1998
DOI: 10.1021/jp980245m
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Compositional Mapping by Laser-Induced Breakdown Spectroscopy

Abstract: A sensitive optical technique for compositional mapping of solid surfaces using laser-induced breakdown spectroscopy (LIBS) is described. A pulsed Nd:YAG laser with second harmonic module was focused on the solid surface, giving a small ablation area, to produce plasma emission. Copper and magnesium emissions from a standard sample were carefully analyzed and assigned in the wavelength range 500-520 nm. The assigned spectral information was selected to construct an image of 100 × 100 pixels by mapping the meas… Show more

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Cited by 73 publications
(26 citation statements)
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“…Depending on the laser wavelength, beam divergence, beam mode quality, and focusing optics, lateral resolution on the order of 10 m can be obtained (73). LIBS has been used for compositional mapping, i.e., spatial mapping of the elemental composition of a sample, for a number of applications including: image mapping a copper conductor pattern from a printed circuit board (79), field analysis of inorganic wood preservatives (80), generating distribution maps of poisoning elements (phosphorous [P], Zn, and Pb) in automobile catalytic converters (81), large area mapping of non-metallic inclusions in stainless steel (82), scanning microanalysis of aluminum alloys (83), and surface mapping of granite samples (84).…”
Section: Compositional Mappingmentioning
confidence: 99%
“…Depending on the laser wavelength, beam divergence, beam mode quality, and focusing optics, lateral resolution on the order of 10 m can be obtained (73). LIBS has been used for compositional mapping, i.e., spatial mapping of the elemental composition of a sample, for a number of applications including: image mapping a copper conductor pattern from a printed circuit board (79), field analysis of inorganic wood preservatives (80), generating distribution maps of poisoning elements (phosphorous [P], Zn, and Pb) in automobile catalytic converters (81), large area mapping of non-metallic inclusions in stainless steel (82), scanning microanalysis of aluminum alloys (83), and surface mapping of granite samples (84).…”
Section: Compositional Mappingmentioning
confidence: 99%
“…The imaging capability of Laser-induced breakdown spectroscopy (LIBS) represents an attractive way of development for the technique, with innumerable applications in various fields, such as geology [1][2][3], industry [4][5][6][7][8], surface science [9,10] and biology [11][12][13][14][15]. In LIBS imaging, laser-induced plasma are generated continuously while scanning the sample surface over the region of interest.…”
Section: Introductionmentioning
confidence: 99%
“…Laser microanalysis should be relevant to any spot diameter below the bulk homogeneity of the sample. Taking into account the homogeneity scale of most materials and competitive techniques, a lateral resolution below 10 µm is required [6][7][8][9][10]. This technique may be called microLIBS, although LIBS microprobe would be more appropriate.…”
Section: Introductionmentioning
confidence: 99%