2011
DOI: 10.1017/s1431927611000213
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Compositional Analysis with Atomic Column Spatial Resolution by 5th-Order Aberration-Corrected Scanning Transmission Electron Microscopy

Abstract: We show in this article that it is possible to obtain elemental compositional maps and profiles with atomic-column resolution across an InxGa1−xAs multilayer structure from 5th-order aberration-corrected high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) images. The compositional profiles obtained from the analysis of HAADF-STEM images describe accurately the distribution of In in the studied multilayer in good agreement with Muraki's segregation model [Muraki, K., Fukatsu, S.… Show more

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Cited by 15 publications
(19 citation statements)
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“…The procedure to quantify Bi content was similar to the one published in Ref. [28]. In this work, the integrated intensity quotients of every dumbbell ( R ) was calculated as a ratio between the integrated intensity in the group V columns ( I As − Bi ) in the whole image and the mean integrated intensity in the group V columns in the GaAs layer ( I As ), as R  = ( I (As − Bi) )/ I As .…”
Section: Resultsmentioning
confidence: 99%
“…The procedure to quantify Bi content was similar to the one published in Ref. [28]. In this work, the integrated intensity quotients of every dumbbell ( R ) was calculated as a ratio between the integrated intensity in the group V columns ( I As − Bi ) in the whole image and the mean integrated intensity in the group V columns in the GaAs layer ( I As ), as R  = ( I (As − Bi) )/ I As .…”
Section: Resultsmentioning
confidence: 99%
“…Figure 5g shows a magnified dumbbell where the upper and lower columns are the anionic and cationic components, respectively. In order to estimate column-by-column the Sb and In contents, a method similar to the one used in [9,19] was performed. The R values corresponding to each sub-net column, R i , are represented in Figure 5 with colored dots, where higher values (red dots) are associated with atomic columns with higher proportion of heavier elements with respect to the corresponding atomic columns in GaAs.…”
Section: Resultsmentioning
confidence: 99%
“…In order to being able to compare these experimental results to the simulated images, it is necessary to average the intensity over a significant number of atomic columns. For this, we have used a method for measuring the integrated intensities around each atomic column [29] that has been successfully used previously for the calculation of the composition of different semiconductor materials from experimental HAADF-STEM image [31-32]. In the case of more than one MoS 2 layers, the crystal can be considered as its bulk crystalline structures, in which a layer-stacked of S-Mo-S units are repeated following two main trigonal phases: the first one is a trigonal-prismatic 2H and the second one is a rhombohedral structure, also called 3R-MoS 2 [33-34].…”
Section: Quantitative Analysismentioning
confidence: 99%