2005
DOI: 10.1063/1.2099533
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Composition profiles of InAs–GaAs quantum dots determined by medium-energy ion scattering

Abstract: The composition profile along the ͓001͔ growth direction of low-growth-rate InAs-GaAs quantum dots ͑QDs͒ has been determined using medium-energy ion scattering ͑MEIS͒. A linear profile of In concentration from 100% In at the top of the QDs to 20% at their base provides the best fit to MEIS energy spectra.

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Cited by 22 publications
(17 citation statements)
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“…Several models of strain-induced QD formation have been proposed [2][3][4][5] but none of them takes the very important process of intermixing of the InAs deposit with substrate material into account. Growth parameter-dependent intermixing leads to a high content up to 90% of unintentional substrate material in the bottom layer of the QDs [6][7][8][9] which significantly modifies their strain status [10] and thus the process of QD formation. In this paper, we provide a model of QD formation that considers intermixing with substrate material.…”
Section: Introductionmentioning
confidence: 99%
“…Several models of strain-induced QD formation have been proposed [2][3][4][5] but none of them takes the very important process of intermixing of the InAs deposit with substrate material into account. Growth parameter-dependent intermixing leads to a high content up to 90% of unintentional substrate material in the bottom layer of the QDs [6][7][8][9] which significantly modifies their strain status [10] and thus the process of QD formation. In this paper, we provide a model of QD formation that considers intermixing with substrate material.…”
Section: Introductionmentioning
confidence: 99%
“…7͒ and Au nanoparticles 8,9 and of InAs-GaAs quantum dots. 10 Basically the nanoparticles' shape, composition, size distribution, and stoichiometry have been successfully obtained. In addition, the determination of the number of nanosize inhomogeneities in thin films was also investigated for some particular geometrical shapes.…”
Section: Introductionmentioning
confidence: 99%
“…Superimposed on the data are simulations calculated using an energy simulation code. This code is described in more detail elsewhere [19] but has been modified to incorporate an asymmetric lineshape (exponentially modified Gaussian) as this has been shown to be important when fitting energy spectra [20].…”
Section: Methodsmentioning
confidence: 99%