CoSb 3 -based Skutterudites are among the best materials for thermoelectric generator (TEG) applications in the intermediate temperature range up to 500 C. Synthesis of these materials is usually performed on a laboratory scale in materials research. In order to be suitable for an industrial low cost production of TEG technologies capable of delivering large amounts of thermoelectric (TE) materials are needed. A process mastering this challenge is gas atomization, which has been adapted to the requirements of TE materials, in particular CoSb 3 -based Skutterudites. It is found that despite rapid solidification taking place in the atomization process the produced powder material contains only traces of the target Skutterudite phase. Microstructure investigation shows a very fine dispersion on the micrometer scale of CoSb, CoSb 2 , and Sb phases in the atomized particles, making diffusion paths for the formation of the Skutterudite phase short. This allows the use of short-term heat treatment to achieve almost single phase material of high functional homogeneity. Different thermal post-treatments are evaluated leading to a content of >98% of the Skutterudite phase in large ingots. Doping and filling by varying the starting composition is applied to tune the materials to n-and p-type conduction, respectively, and led to an increase of their thermoelectric figure of merit ZT up to values of 0.9 and 0.72 for n-and p-type material, respectively.