2006
DOI: 10.1016/j.jmmm.2006.01.152
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Composition dependence of crystallization temperature and magnetic property of NdFeB thin films

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Cited by 8 publications
(3 citation statements)
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“…( BH ) max at T s = 300 °C is slightly smaller than the ideal value probably due to the rounding at corner of M‐H loops and the small difference between M s and M r ( M r / M s = 0.94). The largest energy product up to 2.60 MGOe is observed in the film grown at 300 °C, which is larger than that previously reported in bulk polycrystalline D 0 22 ‐Mn 2∼3 Ga alloys (<5.5 kJ m −3 or 0.68 MGOe)29 and steels magnets (∼1 MGOe),8 and also comparable with hard ferrite magnets (∼3 MGOe),8 while still smaller than that in the rare‐earth based magnets like SmCo 5 (22 MGOe)34 and Nd 2 Fe 14 B (18 or 56 MGOe) 8, 35. Here, it is the small M s that limits the magnitude of ( BH ) max of the films, though relatively small M s is appreciated in spin‐torque applications.…”
mentioning
confidence: 56%
“…( BH ) max at T s = 300 °C is slightly smaller than the ideal value probably due to the rounding at corner of M‐H loops and the small difference between M s and M r ( M r / M s = 0.94). The largest energy product up to 2.60 MGOe is observed in the film grown at 300 °C, which is larger than that previously reported in bulk polycrystalline D 0 22 ‐Mn 2∼3 Ga alloys (<5.5 kJ m −3 or 0.68 MGOe)29 and steels magnets (∼1 MGOe),8 and also comparable with hard ferrite magnets (∼3 MGOe),8 while still smaller than that in the rare‐earth based magnets like SmCo 5 (22 MGOe)34 and Nd 2 Fe 14 B (18 or 56 MGOe) 8, 35. Here, it is the small M s that limits the magnitude of ( BH ) max of the films, though relatively small M s is appreciated in spin‐torque applications.…”
mentioning
confidence: 56%
“…The thickness of the films was controlled by the sputtering time. The target was manufactured using the induction-melting technique, and the composition of Nd 16 Fe 73 B 11 with rich Nd was chosen for the formation of the Nd-rich phase to realize good permanent magnetic properties, 13 and compensate for the possible loss of Nd during the deposition process. After the deposition, the films were sealed in an evacuated quartz tube with a vacuum less than 10 À4 Pa and then processed by rapid thermal annealing at 700 C for 1-3 min, followed by cooling down to room temperature in air.…”
Section: A)mentioning
confidence: 99%
“…[1][2][3][4] The fabrication of Nd 2 Fe 14 B thin films has also been the focus of research, noting that permanent magnetic films with specialized magnetic performance are required in key applications of microstructural devices. [5][6][7][8][9][10][11][12][13] This applies in various fields, such as magnetic microelectromechanical devices, magnetic sensors, and magnetic storage. For this purpose, it is necessary to make permanent magnetic thin films.…”
mentioning
confidence: 99%