Composition Control of TaSixNy Thin Films by Chemical Vapor Deposition for Future n-MOSFET Metal Gate Electrode

Sugita, Yoshiki; Aoyama, Takayuki; Nara, Yasuo

doi:10.1149/1.2355724

Cited by 3 publications

(2 citation statements)

References 5 publications

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“…In Fig. 1, The PDMAT and DMA spectra both exhibit relatively intense features in the fingerprint region below ≈1500 cm −1 and C–H stretching region from ≈2700 cm −1 to ≈3100 cm −1 , in agreement with previous reports for PDMAT 27–29 and DMA. 30–32 In both spectral regions, the molar absorptivity of PDMAT features tends to be larger than those of DMA.…”

Section: Methodssupporting

confidence: 91%

“…[20][21][22][23][24][25][26] Of these demonstrated NDIR gas analyzers, a number operate based on isolating absorption modes in the C-H stretching spectral region. 21,25,26 Since both PDMAT and DMA absorb in this spectral region, [27][28][29][30][31][32] the potential for strong spectral interference between the two species is high in this region, complicating data analysis. To reduce the potential for interference between a metal alkylamide and the corresponding amine decomposition product, NDIR gas analyzers designed to monitor both species can be based on isolating absorption modes in the fingerprint spectral region.…”

Section: Introductionmentioning

confidence: 99%

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Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

et al. 2020

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Section: Methodssupporting

confidence: 91%

Section: Introductionmentioning

confidence: 99%

Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

et al. 2020

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Characterizing Metal Coordination Environments in Porous Organic Polymers: A Joint Density Functional Theory and Experimental Infrared Spectroscopy Study

López-Encarnación

Tanabe

Johnson

et al. 2013

Chemistry A European J

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Very POP right now! DFT computational analysis on the structural, energetic, and IR spectroscopic characteristics of a porous organic polymer support, [Ta(NMe2 )5 ] as a molecular precursor, and the catalytic material synthesized from these two components are presented and analyzed against recorded IR spectra of these systems. The analysis leads to unambiguous identification of the atomic structure of the POP-supported Ta-amide reaction center synthesized in the experiment.

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Characterization of vapor draw vessel performance for low-volatility solid precursor delivery

Maslar

Kimes

Sperling

et al. 2020

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Low volatility precursors are widely utilized in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. Compared to gases and high volatility liquid precursors, delivery of low volatility liquid and solid precursors can be problematic, with solid precursors being particularly so. To investigate some of these delivery issues, the performance of a vapor draw vessel was characterized for the delivery of pentakis(dimethylamido) tantalum (PDMAT), a low-volatility solid precursor at preferable delivery temperatures, for reduced-pressure cyclical CVD and ALD processes. Vessel characterization involved determining (1) a source efficiency as a function of process conditions and (2) the degree of PDMAT decomposition as a function of temperature and vessel idle time. The PDMAT partial pressure, flow rate, and mass per injection used to determine the source efficiency were determined from measurements obtained using a custom-designed non-dispersive infrared gas analyzer. For a series of injections after an idle/purge sufficiently long to saturate the vessel head space, the source efficiency decreased from a maximum slightly less than unity for the first injection until a consistent value was reached that was approximately one half to one third of the maximum value. A comparable trend was observed for mass delivered per injection. For the conditions used in this investigation, the source efficiency decreased when the injection time was increased to longer than 1 s, when pressure was decreased, and when the carrier gas flow rate was increased. Although the corresponding mass per injection increased with these changes, the increase in mass was less than that predicted had the carrier gas been saturated. The source efficiency did not depend strongly on temperature and only moderately on vessel idle durations (4–16 s). The degree of PDMAT decomposition was evaluated by measuring the partial pressure of dimethylamine (the primary PDMAT decomposition product under the conditions of this investigation) using the same gas analyzer. For a given idle time, the amount of dimethylamine delivered more than doubled as vessel temperature was increased from 68 to 78 °C.

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Composition Control of TaSixNy Thin Films by Chemical Vapor Deposition for Future n-MOSFET Metal Gate Electrode

Cited by 3 publications

References 5 publications

Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

Characterizing Metal Coordination Environments in Porous Organic Polymers: A Joint Density Functional Theory and Experimental Infrared Spectroscopy Study

Characterization of vapor draw vessel performance for low-volatility solid precursor delivery

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