2008
DOI: 10.1016/j.snb.2007.12.038
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Composite porous silicon-crystalline silicon cantilevers for enhanced biosensing

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Cited by 51 publications
(25 citation statements)
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“…Subsequent binding of target molecules to one side of the cantilever causes a static cantilever deflection that be correlated to a specific surface binding reaction or molecular reorganisation process. So far, microcantilever based sensors have been successfully used to monitor a variety of different physical [3,4], chemical [5,6] and biological interactions [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…Subsequent binding of target molecules to one side of the cantilever causes a static cantilever deflection that be correlated to a specific surface binding reaction or molecular reorganisation process. So far, microcantilever based sensors have been successfully used to monitor a variety of different physical [3,4], chemical [5,6] and biological interactions [7,8].…”
Section: Introductionmentioning
confidence: 99%
“…Be to, pjezoelektrinės plonos plėvelės viršuje karšto įspaudimo technologija suformuota 4 μm periodinė mikrostruktūra. Toks kompozitas yra lankstus ir pasižymi pjezoelektrinėmis savybėmis, o periodinė mikrostruktūra leidžia panaudoti ne tik energijai išgauti, bet ir jutikliuose (Bruck et al 2013;Ziegler 2004;Tomkins et al 2013;Stolyarova et al 2008;Albert et al 2013;Tripathi et al 2012;Egea et al 2013). Bandymai parodė, kad 4 µm storio ir 0,001 m 2 ploto pjezoelektrinis elementas deformuodamasis sukuria 80 µV įtampą.…”
Section: įVadasunclassified
“…Novel asymmetric porous-silicon-over-silicon (PSOS) micro-cantilevers made according to Fig. 13, using vapour phase stain etching (Stolyarova et al, 2008), offer inherently asymmetric, highly sensitive and easy to coat systems. The resulting micro-cantilevers are characterised by a rough surface on their lower side and an intact flat surface on their upper side, Fig.…”
Section: Detection Of Alkylating Agents Using Chemo-mechanical Asymmementioning
confidence: 99%