2002
DOI: 10.1002/1522-2683(200210)23:20<3461::aid-elps3461>3.0.co;2-8
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Components for integrated poly(dimethylsiloxane) microfluidic systems

Abstract: This review describes the design and fabrication of microfluidic systems in poly(dimethylsiloxane) (PDMS). PDMS is a soft polymer with attractive physical and chemical properties: elasticity, optical transparency, flexible surface chemistry, low permeability to water, and low electrical conductivity. Soft lithography makes fabrication of microfluidic systems in PDMS particularly easy. Integration of components, and interfacing of devices with the user, is also convenient and simpler in PDMS than in systems mad… Show more

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Cited by 576 publications
(411 citation statements)
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“…[1][2][3] Electro-osmotic flow ͑EOF͒ is often employed in PDMS and other microchips for various biomicrofluidic applications. 4 The knowledge of electro-osmotic characteristics is then essential for microchip design and process control.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] Electro-osmotic flow ͑EOF͒ is often employed in PDMS and other microchips for various biomicrofluidic applications. 4 The knowledge of electro-osmotic characteristics is then essential for microchip design and process control.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, microfluidic systems and biochips made from lowcost polymeric materials such as poly(dimethsiloxane) (PDMS), [9][10][11][12] poly(methylmethacrylate) (PMMA), [13][14][15] and others (see Becker and Locascio 16 for a comprehensive review) as opposed to traditional materials such as glass or silicon have become more and more prevalent. The primary attractiveness of these materials is that they tend to involve simpler and significantly less expensive manufacturing techniques (for example: casting, injection and replica moulding, and hot embossing), 16 however they are also amenable to surface modification [17][18] and the wide variety of physiochemical properties allows the matching of specific polymers to particular applications.…”
Section: Introductionmentioning
confidence: 99%
“…The difference is possibly related to the surface rearrangements that would bring hydrophobic groups to material surface. 1 Amino groups are less hydrophilic than silanol groups, and the surface energy of N 2 plasma-activated PDMS is lower than that of oxygen plasma-activated PDMS. Consequently, such a surface rearrangement in N 2 plasma-activated PDMS is slower and less significant than that in oxygen plasma-activated PDMS.…”
Section: Resultsmentioning
confidence: 99%
“…SU-8 photoresist SU-8 is widely used to prepare the master molds for replication of PDMS (polydimethylsiloxane) microfluidic channels, 1 but it is also directly used for fabricating microfluidic channels. When the material is directly used for channel fabrication, it is simple to integrate the channel with sensors and other components through standard mask alignment and photolithographic processes.…”
Section: Introductionmentioning
confidence: 99%