Component having an acoustically active material for tuning during operation

Korden, C.

doi:10.1121/1.1948257

Cited by 1 publication

(2 citation statements)

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“…The thicknesses of each deposition were of 2, 5, 10 and 20 nm, respectively. This procedure is one implementation of the mass-loading approaches for building tunable FBAR devices found in the literature [4][5][6]. In our implementation, a non-metallic material was deposited.…”

Section: Frequency-tuning Sensitivity and Responsivitymentioning

confidence: 99%

“…Taking advantage of a similar principle, it has been demonstrated that the electrical properties of its composing materials can be changed applying an electric field, thus modifying the resonance frequency [4]. Indeed, some applications using this approach have been patented for the integration of acoustically active materials or devices, as well 0960-1317/07/112380+10$30.00 © 2007 IOP Publishing Ltd Printed in the UK [5,6]. Frequency adjustment of micro-electromechanical cantilevers using electrostatic pull-down has also been explored in [7].…”

Section: Introductionmentioning

confidence: 99%

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Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Campanella

Hernández-Ramírez

Romano‐Rodríguez

et al. 2007

J. Micromech. Microeng.

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A focused-ion-beam-assisted procedure with the aim of frequency tuning thin-film bulk acoustic resonators (FBARs) is presented. The procedures of focused-ion-beam-based deposition and milling on the FBAR are described, detailing calibration and alignment issues. A C/Pt/Ga composite was locally deposited on the top electrode of the FBAR by means of ion-assisted deposition. Selected areas of the electrode were chosen to deposit the localized composite, having micrometer dimensions and nanometer thicknesses. Based on the mass-loading principle, a down-shifting in the resonance frequency was observed. The achieved responsivity of 7.4 × 10−19 g Hz−1 was demonstrated to be at least one order of magnitude better than for the thin-film deposition case. Different localized-mass-loading configurations were tested and the possible effects of the ion beam on the physical properties of the resonator analyzed. It was found that responsivity is dependent on the size of the tuning mass and that the Q factor does not suffer significant variation due to the i-beam operation.

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Section: Frequency-tuning Sensitivity and Responsivitymentioning

confidence: 99%