“…While such deformation is not a major problem for transmitting elements, this becomes a major issue when working with reflected wavefront or with complex optical systems. In order to overcome these limitations, it is either possible to work on the mitigation of individual layer stress level [4,5], the mitigation of stress-induced deformation [6,7] or to perform stress compensation using dual side coatings with different optical functions [8][9][10]. Using the last approach, these coatings may even be designed to be athermal, i.e.…”