2015
DOI: 10.1002/pssa.201431674
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Complementary and bipolar regimes of resistive switching in TiN/HfO2/TiN stacks grown by atomic‐layer deposition

Abstract: Atomic‐layer deposition (ALD) technique in combination with in vacuo X‐ray photoelectron spectroscopy (XPS) analysis has been successfully employed to obtain fully ALD‐grown planar TiN/HfO2/TiN metal–insulator–metal structures for resistive random access memory (ReRAM) memory elements. In vacuo XPS analysis of ALD‐grown TiN/HfO2/TiN stacks reveals the presence of the ultrathin oxidized layers consisting of TiON (∼0.5 nm) and TiO2 (∼0.6 nm) at the bottom TiN/HfO2 interface (i); the nonoxidized TiN at the top Hf… Show more

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Cited by 40 publications
(28 citation statements)
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“…Recently, the most actively researched binary oxide materials for electronic synapses are HfO x , TaO x , WO x , and ZnO, which facilitate in achieving scalability and a simple structure. Because binary oxides are conventional materials for resistive switching memories, there are many reports about binary oxide‐based electronic synapses.…”
Section: Metal Oxidesmentioning
confidence: 99%
See 1 more Smart Citation
“…Recently, the most actively researched binary oxide materials for electronic synapses are HfO x , TaO x , WO x , and ZnO, which facilitate in achieving scalability and a simple structure. Because binary oxides are conventional materials for resistive switching memories, there are many reports about binary oxide‐based electronic synapses.…”
Section: Metal Oxidesmentioning
confidence: 99%
“…There are various possible materials that can achieve memristive properties. These include binary oxides, oxide perovskites, polymers, bioinspired materials, 2D materials, halide perovskites, and low‐dimensional materials as shown in Figure . Each material has advantages in the working mechanism and/or properties of itself, which results in improved performances of memristive devices and artificial synapses.…”
Section: Introductionmentioning
confidence: 99%
“…Using Equation (1), the hopping distance is found to be approximately 0.58 nm, which is close to the reported value of 1 6 0.1 nm using TiN/HfO 2 /TiN structure. 10 Chen et al 18 have also reported the hopping distance ranging from 1.4 to 0.3 nm with current compliances of 10 to 100 lA using a Pt/ Zn:SiO 2 /TiN structure. On the other hand, the linear nature of ln(J/E) vs. E 1/2 curve confirms the Poole-Frenkel conduction mechanism at "1" state for a high field regime (À1 to À4 V) of the S2 devices ( Fig.…”
mentioning
confidence: 93%
“…Besides, Egorov et al have also shown the transition between CRS ↔ BRS can be achieved by applying an asymmetrical sweeping voltage in TiN/HfO x /TiN memory structure 53. Although, during the BRS operation in a 1T1R bipolar RRAM test array, the activation of unwanted self-CRS from BRS is very risky.…”
mentioning
confidence: 97%