2014
DOI: 10.1063/1.4892015
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Competitive gettering of iron in silicon photovoltaics: Oxide precipitates versus phosphorus diffusion

Abstract: Experiments have been conducted to understand the behaviour of iron in silicon containing oxide precipitates and associated defects (dislocations and stacking faults), which is subjected to phosphorus diffusion gettering. Injection-dependent minority carrier lifetime measurements are analysed to provide quantitative information on the degree to which the precipitates and associated defects are decorated with iron impurities. These data are correlated with bulk iron measurements based on the photodissociation o… Show more

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Cited by 23 publications
(13 citation statements)
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References 32 publications
(63 reference statements)
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“…An important uncertainty to the actual iron content is given by the drive-in diffusion after implantation. A loss of iron could occur via segregation in the growing oxide (gettering) or in the etched surface region [11]. Also precipitation of iron could occur [11], resulting in iron that is not detectable via lifetime evaluations, since precipitated iron does not take part in the metastable defect state change [12].…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…An important uncertainty to the actual iron content is given by the drive-in diffusion after implantation. A loss of iron could occur via segregation in the growing oxide (gettering) or in the etched surface region [11]. Also precipitation of iron could occur [11], resulting in iron that is not detectable via lifetime evaluations, since precipitated iron does not take part in the metastable defect state change [12].…”
Section: Resultsmentioning
confidence: 99%
“…A loss of iron could occur via segregation in the growing oxide (gettering) or in the etched surface region [11]. Also precipitation of iron could occur [11], resulting in iron that is not detectable via lifetime evaluations, since precipitated iron does not take part in the metastable defect state change [12]. Another reason for a lower iron content is gettering in the surface passivation layer [13].…”
Section: Resultsmentioning
confidence: 99%
“…It is known that OPs can act as internal gettering sites for metallic impurities, effectively increasing the precipitation of transition metal impurities (such as Fe). [21,22] Such impurity-decorated OPs and transition metal impurities (both in the dissolved and precipitated states) also act as effective recombination centers in p-type silicon. [23,24] 2.2.…”
Section: Srh Lifetimes Due To Fega Pairsmentioning
confidence: 99%
“…The strain-enhanced diffusion phenomenon is analogous to the diffusion of metals atoms that occurs during the internal gettering process often employed for the integrated circuit manufacturing[53,54,55] …”
mentioning
confidence: 99%