Competition between gettering by implantation-induced cavities in silicon and internal gettering associated with SiO{sub 2} precipitation

McHugo, Scott A.; Weber, E. R.; Myers, S. M.; Petersen, G. A.

doi:10.2172/432984

1996

DOI: 10.2172/432984

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Competition between gettering by implantation-induced cavities in silicon and internal gettering associated with SiO{sub 2} precipitation

Scott A. McHugo¹,

E. R. Weber

S. M. Myers³

et al.

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Competition between gettering by implantation-induced cavities in silicon and internal gettering associated with SiO{sub 2} precipitation

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References 8 publications

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