Competition and cooperation between lattice-oriented growth and step-templated growth of aligned carbon nanotubes on sapphire

Ago, Hiroki; Imamoto, Kenta; Ishigami, Naoki; Ohdo, Ryota; Ikeda, Ken; Tsuji, Masaharu

doi:10.1063/1.2715031

Cited by 61 publications

(59 citation statements)

References 20 publications

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“…Thermal annealing of the substrates in air is necessary before photolithography because thermal treatment of quartz wafers at high temperature greatly decreases the number of OH groups on the surface [25] and thus improves the adhesion between photoresist and quartz wafers. Although thermal annealing for a long time at high temperature can increase the number of the atomic steps on the surface of quartz 6] or sapphire wafers [26], in our observations by AFM (Fig. 2(b)), there were no obvious atomic steps produced on the quartz surface by 1-h thermal treatment.…”

Section: Nano Researchmentioning

confidence: 50%

Wafer scale synthesis of dense aligned arrays of single-walled carbon nanotubes

2008

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Here we present an easy one-step approach to pattern uniform catalyst lines for the growth of dense, aligned parallel arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (μCP). By directly doping an FeCl 3 /methanol solution into Shipley 1827 photoresist or polyvinylpyrrolidone (PVP), various catalyst lines can be wellpatterned on a wafer scale. In addition, during the chemical vapor deposition (CVD) growth of SWNTs the polymer layers play a very important role in the formation of mono-dispersed nanoparticles. This universal and effi cient method for the patterning growth of SWNTs arrays on a surface is compatible with the microelectronics industry, thus enabling of the fabrication highly integrated circuits of SWNTs.

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Section: Nano Researchmentioning

confidence: 50%

Wafer scale synthesis of dense aligned arrays of single-walled carbon nanotubes

2008

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“…Interactions with the substrate have previously been exploited in the growth of aligned carbon nanotubes (CNTs) by chemical vapor deposition (CVD). [19][20][21][22][23][24][25] Considering the metalassisted etching as the opposite reaction of the CVD growth process, [ 15,17 ] substrate-induced alignment may also occur in the etching of graphene. A recent study has shown that, under certain circumstances, the interaction with the substrate can effectively infl uence the etching direction.…”

Section: Doi: 101002/adma201302619mentioning

confidence: 99%

Dense Arrays of Highly Aligned Graphene Nanoribbons Produced by Substrate‐Controlled Metal‐Assisted Etching of Graphene

et al. 2013

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Dense arrays of aligned graphene nanoribbons (GNRs) are fabricated by substrate-controlled etching of large-area single-layer graphene. An adequate choice of etching substrate and catalyst deposition method allows densities up to 25 nanoribbons μm(-1) to be obtained with average widths of 19 nm. The efficacy of the method is evidenced by the high on/off ratios of back-gated transistors made with these GNRs, which can go up to 5000.

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“…[19] At present, the control of growth orientation is carried out using specific crystalline substrates, such as sapphire [20,21] or ST-cut quartz surfaces, [15] Although perfect horizontal alignment between SWNTs has been reported using a line-patterned catalyst, the case inevitably has a broad distribution of particle-and tube-diameters in the end. Thus, to accomplish diameter-control of SWNTs and finally use them in nanoelectronic devices, parallel alignment of SWNTs from monodispersed catalytic nanoparticles is an essential step.…”

Section: Resultsmentioning

confidence: 99%

Effect of catalytic metals on diameter-controlled growth of single-walled carbon nanotubes: Comparison between Fe and Au

Lee

Jeong

2012

Electron. Mater. Lett.

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We investigated the effect of catalytic metals on diameter-controlled growth of single-walled carbon nanotubes (SWNTs) using different catalytic nanoparticles. We chose Fe and Au nanoparticles as catalysts for the growth of the SWNTs and compared the experimental results in terms of the diameter control of the SWNTs. Since there is a size relationship between SWNTs and catalysts, our approach involved controlling the size of the catalytic nanoparticles. First, the Fe and Au nanoparticles were monodispersed onto quartz substrates by optimizing the spincasting conditions and were subsequently thermally annealed in order to evaporate the nanoparticles. With the same annealing treatment at 900°C, it was found that the average diameter of the Au decreased more rapidly than that of the Fe nanoparticles. Finally, thin SWNTs were obtained with a much narrower diameter distribution from the evaporated Au nanoparticles than were obtained from the evaporated Fe nanoparticles.

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Competition and cooperation between lattice-oriented growth and step-templated growth of aligned carbon nanotubes on sapphire

Cited by 61 publications

References 20 publications

Wafer scale synthesis of dense aligned arrays of single-walled carbon nanotubes

Wafer scale synthesis of dense aligned arrays of single-walled carbon nanotubes

Dense Arrays of Highly Aligned Graphene Nanoribbons Produced by Substrate‐Controlled Metal‐Assisted Etching of Graphene

Effect of catalytic metals on diameter-controlled growth of single-walled carbon nanotubes: Comparison between Fe and Au

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