“…Thin film materials have been used as functional devices in the applications of semi-conductors [2,8,9,10], metal hydrides [1,4,5,11,12,13], and solar cells [14,15], etc. It is more conducive to the combination of multiple functional materials to form multilayer film materials [16,17], which can not only realize the unique characteristics of each material, but also give play to the characteristics of new interface materials [18,19,20] and improve their comprehensive performance [19,20,21,22,23]. Therefore, the design and fabrication of new multilayer functional materials have attracted attention as hot issues in current research [23].…”