Compensation of the sheath effects in cylindrical floating probes

Abstract

In cylindrical floating probe measurements, the plasma density and electron temperature are overestimated due to sheath expansion and oscillation. To reduce these sheath effects, a compensation method based on well-developed floating sheath theories is proposed and applied to the floating harmonic method. The iterative calculation of the Allen-Boyd-Reynolds equation can derive the floating sheath thickness, which can be used to calculate the effective ion collection area; in this way, an accurate ion density is obtained. The Child-Langmuir law is used to calculate the ion harmonic currents caused by sheath oscillation of the alternating-voltage-biased probe tip. Accurate plasma parameters can be obtained by subtracting these ion harmonic currents from the total measured harmonic currents. Herein, the measurement principles and compensation method are discussed in detail and an experimental demonstration is presented.