2019
DOI: 10.3390/mi11010009
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Compensation of Hysteresis in the Piezoelectric Nanopositioning Stage under Reciprocating Linear Voltage Based on a Mark-Segmented PI Model

Abstract: The nanopositioning stage with a piezoelectric driver usually compensates for the nonlinear outer-loop hysteresis characteristic of the piezoelectric effect using the Prandtl–Ishlinskii (PI) model under a single-ring linear voltage, but cannot accurately describe the characteristics of the inner-loop hysteresis under the reciprocating linear voltage. In order to improve the accuracy of the nanopositioning, this study designs a nanopositioning stage with a double-parallel guiding mechanism. On the basis of the … Show more

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Cited by 6 publications
(6 citation statements)
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References 31 publications
(33 reference statements)
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“…Hysteresis compensation is performed using dynamic inversion compensation, which uses NN for dynamic inversion compensation [19]. Other types of hysteresis models, including backlash and electronics, can be identified from references [1][2][3]. However, general history models will not be convenient because they are complex.…”
Section: Hysteresis Nonlinearitymentioning
confidence: 99%
See 1 more Smart Citation
“…Hysteresis compensation is performed using dynamic inversion compensation, which uses NN for dynamic inversion compensation [19]. Other types of hysteresis models, including backlash and electronics, can be identified from references [1][2][3]. However, general history models will not be convenient because they are complex.…”
Section: Hysteresis Nonlinearitymentioning
confidence: 99%
“…Industrial dynamical control systems have generally the structure of a nonlinear system in front of some nonlinearity in the actuator, for example, dead-zone, backlash, and hysteresis, etc. Hysteresis phenomena caused by magnetism, stiction or gear with backlash generally exist in control system [1][2][3] and often severely reduce system performance such as giving rise to oscillations and/or undesirable inaccuracy, even leading to instability. Hysteresis characteristics are usually unknown and/or generally nondifferentiable nonlinearities.…”
Section: Introductionmentioning
confidence: 99%
“…Since x-axes and y-axes are decoupled in the process of structural design and incey share the same dynamic characteristics with each other, the one-dimensional motion of the compliant 2-DOF ejector pin mechanism is studied in the following analysis. Due to the presentation of the hysteresis behavior of the piezoelectric actuator, the tracking accuracy of the device is greatly restricted [29]. Even worse, the sensor noise increases the measurement error, which is used to correct the input.…”
Section: Controller Designmentioning
confidence: 99%
“…Piezoelectric actuators use the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy to achieve movement output, and they are widely used in fields such as robotics [1], precision instrumentation [2], nanoscale positioning [3], and bioengineering [4].…”
Section: Introductionmentioning
confidence: 99%