“…Film growth on substrates such as silicon and sapphire is the most common device preparation method [5,6], with the aim of producing transistors with high electron mobility. However, a key issue with the growth of these films is the presence of threading dislocations (TDs), a concern when fabricating GaN-based semiconductor devices due to the negative effects they may have on device quality such as increased current leakage [7,8], decreased efficiency and lifetime [9], disrupted electric field distribution and a premature breakdown due to microplasmas [10,11]. Dislocation densities in the range of 10 8 cm −2 to 10 10 cm −2 are often recorded for few-to-several micrometer-thick heteroepitaxially grown GaN films [12,13].…”