“…Nevertheless, since only stacks of dielectric layers were deposited, the combined losses can be estimated as follows: . This value is much lower than data already reported, mainly close to a few 10 −4 , for room temperature [21,22,41,44,45] as well as for low temperature [23,44,46]. Although tantala losses dominate in all these results, operating frequencies are typically lower than a few kHz that is significantly lower than a few tens of MHz as demonstrated in the present work.…”