Comparison of the adsorption of thin zirconium and titanium oxides films on the 6H‐SiC(0001) surface

Abstract

In this work, adsorption of Ti and Zr on the 6H‐SiC(0001) surface under the oxygen pressure of about 5×10−6 Pa was studied. The topography, the chemical composition and the thermal stability were investigated using the X‐ray photoelectron spectroscopy (XPS) and scanning tunneling microscopy (STM). The results show that deposition of titanium oxide onto the SiC surface results in island growth (Volmer–Weber type), which was clearly seen on STM images, whereas Zr oxides adsorb, rather uniformly, in an almost layer‐by‐layer mode. XPS study shows that titanium occurs in different oxidation states, while in case of Zr metallic and dioxide components dominate. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Synthesis and Characterization of Lead Zirconate Titanate Nanofibers Obtained by Electrospinning

“…The representative deconvoluted Zr 3d XPS spectra of PZT‐S and PZT‐D nanofibers are shown in the left and the right of Figure (a), respectively. The Zr 3d XPS spectra of PZT‐S/D were deconvoluted with three peaks and assigned to Zr 4+ of PZT, PbZrO 3 , and ZrO 2 centered at the binding energies of 181.4, 182.3, and 183.2 eV, respectively (Table ) . As the annealing temperature increased, the intensity of Zr 4+ of PbZrO 3 increased while Zr 4+ of PZT decreased in both PZT‐S and PZT‐D nanofibers.…”

“…The Zr 3d XPS spectra of PZT-S/D were deconvoluted with three peaks and assigned to Zr 4+ of PZT, PbZrO 3 , and ZrO 2 centered at the binding energies of 181.4, 182.3, and 183.2 eV, respectively ( Table 2). [23][24][25] As the annealing temperature increased, the intensity of Zr 4+ of PbZrO 3 increased while Zr 4+ of PZT decreased in both PZT-S and PZT-D nanofibers. The Zr 4+ of PbZrO 3 was dominant oxidation state of Zr and Zr 4+ of PZT was undetectable in 1123-S.…”

Investigation of Post Annealing Effect on the PZT Thin Films

“…As post annealing temperature increased the peak of Zr 3d was red shifted and the intensity drastically declined. The Zr 3d was deconvoluted with three peaks and assigned to Zr combined with surface or carbon (Zr-C, 180.5±0.1 eV), Zr 4+ in PZT (181.9±0.1 eV), and ZrO 2 (183.3±0.1 eV) [16][17][18][19] . As post annealing temperature increased, the portion of Zr 4+ gradually decreased while Zr-C increased steadily though the Zr 4+ to form the PZT was dominant.…”