2003
DOI: 10.1016/s0257-8972(03)00043-4
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Comparison of surface cleaning by two atmospheric pressure discharges

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Cited by 17 publications
(9 citation statements)
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“…Even if the cleaning mechanisms are not yet identified, they seem to depend on the kind of plasma source [136]. Metastable energetic species [134,136] (e.g.…”
Section: Surfaces Treatmentsmentioning
confidence: 99%
See 1 more Smart Citation
“…Even if the cleaning mechanisms are not yet identified, they seem to depend on the kind of plasma source [136]. Metastable energetic species [134,136] (e.g.…”
Section: Surfaces Treatmentsmentioning
confidence: 99%
“…Metastable energetic species [134,136] (e.g. N 2 , He) seem to play a determining part in contaminant destruction process.…”
Section: Surfaces Treatmentsmentioning
confidence: 99%
“…Nowadays low power APPs have found a wide range of application. These non‐thermal or cold plasmas find applications in gas cleaning or surface treatments such as surface activation and cleaning . Up to now several types of cold APP‐sources have been developed such as those created by RF power or microwave excitation .…”
Section: Introductionmentioning
confidence: 99%
“…Surface contamination is removed during Ar/O 2 plasma pretreatment, during which organic residues react physically or chemically with energetic and reactive species of the plasma. The main phenomenon is likely the oxidation of the contamination, which produces volatile oxidative products that are evacuated by the gas flow. , The substrate overheating during this pretreatment also induces a thickening of the ZnO layer (Figure S3, Supporting Information), whose surface becomes rougher, as evidenced by AFM analyses (Figure S4, Supporting Information). An outward surface oxidation probably occurs, governed by the diffusion of zinc ions from the metallic zinc layer toward the surface and their reaction with oxygen ions or reactive oxygen-containing species from the plasma.…”
Section: Resultsmentioning
confidence: 99%