Comparison of sputtering and atomic layer deposition based ultra-thin alumina protective layers for high temperature surface acoustic wave devices

Zhang, Miling; Chen, Jinkai; Xuan, Weipeng; Song, Xinyu; Xu, Hongsheng; Zhang, Jikai; Wu, Jian; Jin, Hao; Su, Dong; Luo, Jikui

doi:10.1016/j.jmrt.2021.10.081

Cited by 9 publications

(5 citation statements)

References 24 publications

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“…The fundamental sensing principle is based on the resistance of the Pt sensitive layer responding to the ambient temperature. A reliable protective layer is one of the main methods that can be used to improve the high-temperature performance of a thin-film RTD . The SiCN/YSZ protective layer is placed above the Pt sensitive layer to ensure that the sensitivity has sufficient high-temperature resistance.…”

Section: Resultsmentioning

confidence: 99%

“…A reliable protective layer is one of the main methods that can be used to improve the high-temperature performance of a thin-film RTD. 31 The SiCN/YSZ protective layer is placed above the Pt sensitive layer to ensure that the sensitivity has sufficient hightemperature resistance. TiB 2 and YSZ were added as an active or inert filler in the protective layer to further improve the thermal stability of SiCN and inhibit crack propagation.…”

Section: Introductionmentioning

confidence: 99%

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Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Zeng

Chen

et al. 2022

ACS Appl. Mater. Interfaces

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In situ temperature monitoring of curved high-temperature components in extreme environments is challenging for a variety of applications in fields such as aero engines and gas turbines. Recently, extrusion-based direct ink writing (DIW) has been utilized to fabricate platinum (Pt) resistance temperature detectors (RTDs). However, the current Pt RTD prepared by DIW technology suffers from a limited temperature range and poor high-temperature stability. Here, DIW technology and yttria-stabilized zirconia (YSZ)-modified precursor ceramic film packaging have been used to build a Pt RTD with high-temperature resistance, small disturbance, and high stability. The results indicate that the protective layer formed by the liquid phase anchors the Pt particles and reduces the agglomeration and volatilization of the Pt sensitive layer at high temperature. Attributed to the SiCN/YSZ protective layer, the temperature resistance curve of the Pt RTD in the range of 50–800 °C has little deviation from the fitting curve, and the fitting correlation coefficient is above 0.9999. Interestingly, the Pt RTD also has high repeatability and stability. The high temperature resistance drift rate is only 0.05%/h after 100 h of long-term testing at 800 °C and can withstand butane flame up to ∼1300 °C without damage. Moreover, the Pt RTD can be conformally deposited on the outer ring of aerospace bearings by DIW technology and then realize on-site, nondestructive, and real-time monitoring of bearing temperature. The fabricated Pt RTD shows great potential for high-temperature applications, and the novel technology proposed provides a feasible pathway for temperature monitoring of aeroengine internal curved hot-end components.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Zeng

Chen

et al. 2022

ACS Appl. Mater. Interfaces

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“…Meanwhile, to reduce the negative impact of this insulating layer on the performance of SAW devices, only a 20 nm adhesive layer was added. In addition, our previous research found that the metal electrodes with a 10 nm Al 2 O 3 interlayer in the middle of Pt-Rh layer appear less fusion between metal layers after annealing than the electrodes without an interlayer or with a thinner interlayer [24]. This interlayer structure was also adopted in this work.…”

Section: Design Of Composite Electrodesmentioning

confidence: 94%

Single-crystalline AlN/sapphire and composite electrode based ultra-high temperature surface acoustic wave devices

Zhang

Zhu

Xuan

et al. 2023

J. Phys. D: Appl. Phys.

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Single crystalline AlN material is very attractive for the development of high temperature electronic devices owing to its high temperature resistance. However, at ultrahigh temperatures, AlN film still will be oxidized and metal electrodes used for the devices will aggregate and vaporize. The deterioration of the material and metal electrodes eventually fails the AlN-based devices. Here, we report a single crystalline AlN film-based ultrahigh temperature surface acoustic wave (SAW) device. By using a thin alumina (Al2O3) protection layer on surface, oxidation of the AlN piezoelectric film was effectively inhibited at high temperatures. A composite electrode based on multilayer structure of Pt-Rh and Al2O3 was designed and fabricated, with the Al2O3 layer as the diffusion barrier layers to suppressed inter-diffusion, agglomeration and vaporization of the metals. The results showed that the developed AlN SAW devices can withstand high temperatures, and work well at temperatures up to 1400 °C.

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“…These findings highlight the prevailing challenge in the field: the preparation of TFSGs with a higher temperature tolerance, low TCR, and exceptional thermal stability by DIW technology. To improve the high-temperature performance of TFSGs, the deposition of a reliable protective layer is a primary approach. , For example, Li et al developed an AlN/Al 2 O 3 composite film using pulsed laser deposition, and the resulting strain gauge exhibited a strong piezoresistive response at 800 °C . Yang et al prepared an Al 2 O 3 /Al bilayer coating by double ion beam sputtering to enhance the long-term stability of PdCr strain gauges .…”

Section: Introductionmentioning

confidence: 99%

All-Three-Dimensionally-Printed AgPd Thick-Film Strain Gauge with a Glass–Ceramic Protective Layer for High-Temperature Applications

Zeng,

Chen,

Zhao

et al. 2023

ACS Appl. Mater. Interfaces

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A high-temperature thin/thick-film strain gauge (TFSG) shows development prospects for in situ strain monitoring of hot-end components due to their small perturbations, no damage, and fast response. Direct ink writing (DIW) 3D printing is an emerging and facile approach for the rapid fabrication of TFSG. However, TFSGs prepared based on 3D printing with both high thermal stability and low temperature coefficient of resistance (TCR) over a wide temperature range remain a great challenge. Here, we report a AgPd TFSG with a glass–ceramic protective layer based on DIW. By encapsulating the AgPd sensitive layer and regulating the Pd content, the AgPd TFSG demonstrated a low TCR (191.6 ppm/°C) from 50 to 800 °C and ultrahigh stability (with a resistance drift rate of 0.14%/h at 800 °C). Meanwhile, the achieved specifications for strain detection included a strain sensing range of ±500 με, fast response time of 153 ms, gauge factor of 0.75 at 800 °C, and high durability of >8000 cyclic loading tests. The AgPd TFSG effectively monitors strain in superalloys and can be directly deposited onto cylindrical surfaces, demonstrating the scalability of the presented approach. This work provides a strategy to develop TFSGs for in situ sensing of complex curved surfaces in harsh environments.

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Comparison of sputtering and atomic layer deposition based ultra-thin alumina protective layers for high temperature surface acoustic wave devices

Cited by 9 publications

References 24 publications

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Single-crystalline AlN/sapphire and composite electrode based ultra-high temperature surface acoustic wave devices

All-Three-Dimensionally-Printed AgPd Thick-Film Strain Gauge with a Glass–Ceramic Protective Layer for High-Temperature Applications

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