2005
DOI: 10.1049/el:20047409
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Comparison of RSG-MOSFET and capacitive MEMS resonator detection

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Cited by 28 publications
(19 citation statements)
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“…Thus, as the top plate deflects vertically, that is as increases, the capacitance increases according to (2) If is increased to more than , the equilibrium is broken because of the overwhelming electrostatic force, resulting in the snap of the two plates, the theoretical pull-in voltage being (3) II. MOSFETS WITH A NEMS-GATE MOS-NEMS devices combine a MOS transistor and a metal membrane suspended over its channel.…”
Section: B Nems-gate Devices Principlementioning
confidence: 99%
See 1 more Smart Citation
“…Thus, as the top plate deflects vertically, that is as increases, the capacitance increases according to (2) If is increased to more than , the equilibrium is broken because of the overwhelming electrostatic force, resulting in the snap of the two plates, the theoretical pull-in voltage being (3) II. MOSFETS WITH A NEMS-GATE MOS-NEMS devices combine a MOS transistor and a metal membrane suspended over its channel.…”
Section: B Nems-gate Devices Principlementioning
confidence: 99%
“…Digital Object Identifier 10.1109/TNANO.2007.891825 analytical modeling [1], [2], and a very recent report experimentally demonstrated its virtues [3]. Another recent report also proposed a design combining a nanoscale movable gate and a transistor, which could lower the threshold voltage and enhance the drive current [4].…”
mentioning
confidence: 99%
“…It should be noted that the upper and lower cavity dimensions were optimized carefully so that the floating gate does contact either the gate or the substrate. In our device structure, however, switching of the floating gate is controlled via the electrostatic interaction between the gate electrode and the charge stored in the floating gate, and therefore, the pull-in phenomenon is less likely to occur, which is common for conventional suspended metal gate structures [6], [7]. For further reducing V S down to those for FeRAMs and PCRAMs (typically 3-5 V), we should also optimize the structural and material parameters of the outer cavity such as the upper and lower cavity dimensions, thickness of the side walls as well as the choice of material for them.…”
Section: B Structural Optimization For Improving On/off Rangementioning
confidence: 99%
“…Since the operation speed of the NEMS increases primarily in inverse proportion to the square of the beam length, the extremely fast NEMS with the switching time close to the electronic devices may be realized by reducing their dimensions even smaller. It may therefore be worthwhile to consider integrating the NEMS components into conventional Si devices for adding new functionality [6], [7].…”
mentioning
confidence: 99%
“…The action of a NEMFET is significantly different from that of an electrostatically driven CMOS, and needs new physics-based predictive models. A number of empirical models have already been proposed based on 1D electrostatics [40,70] and non-linear oscillator equations [71,72,73]. To improve understanding of the efficient switching characteristics, pull-in instability [74,75] In a movable channel transistor, the idea is to physically separate the channel away from the drain so that in addition to electrostatic depletion, the OFF current can be reduced substantially Figure 3.2: (A) In normally ON device structure, the cantilever starts with contacting both the drain and source electrodes, resulting in active current flow.…”
Section: State Of Practice For Nano-electro-mechanical Fetsmentioning
confidence: 99%