Comparison of methods to measure the rate of neutral free radical production by photo-deionization of negative ion beams

A Simple Method to Monitor the Flux of the Neutral Free-Radical Beam Produced by Laser Photo-Deionization of a Negative Ion Beam

“…1. In order to compare the performances of the ICD and the PMMP methods, we carried out the PDINIB procedure under the condition similar to that of the previous experiment [3] without using the MPDI. A 2 mm-diam, 514.5 nm visible light beam from a CW Ar + ion laser ( Sabre 25 W ( visible ) / 7 W ( UV ), Coherent, Inc. ) was chopped at 0.5-2.0 kHz and was passed through the process chamber perpendicularly to the horizontal beam of 63 Cu − so as to intersect the negative ion beam only once.…”

“…In this article, after introducing the ICD method, we discuss its performance and applicability based on experiments in comparison with those of the method of photoelectron-current measurement by low-frequency electro-modulation probe ( PMMP ) [3].…”

“…Indeed many approaches to produce neutral free-radical beams have been developed also in the fields of experimental chemistry [1], heating of plasmas for controlled thermonuclear fusion, and experimental simulation of low-earth orbit phenomena [2], but efficient production of the refined beam of neutral free radicals ( RBNR ) in steady flux has not been realized yet. In order to overcome the difficulty we have proposed several experimental production approaches, two of which are photo-deionization of negative ion beams ( PDINIB ) [3,4] and photo-dissociation of energetic compound beams ( PDECB ) [5,6].…”

“…We have been developing a trial surface processing apparatus utilizing a steady-flux RBNR produced according to the following PDINIB procedure [3]. Firstly, a steady-flux negative ion beam ( NIB ) of the desired chemical species generated by the high current-density negative ion source is purified at the mass separator.…”

<title>A simple method to monitor the beam flux of neutral free radicals produced by photo-deionization of negative ion beams</title>

“…Indeed many approaches to produce neutral free-radical beams have been developed also in the fields of experimental chemistry [1], heating of plasmas for controlled thermonuclear fusion, and experimental simulation of low-earth orbit phenomena [2J, but efficient production of the steady-flux refined beam of neutral free radicals ( RBNR ) has not been realized yet. In order to overcome the difficulty we have proposed several experimental production approaches, two of which are photo-deionization of negative ion beams ( PDINIB ) [3,4] and photo-dissociation of energetic compound beams ( PDECB ) [5,6. We have been developing a trial surface processing apparatus utilizing a steady-flux RBNR produced according to the following PDINIB procedure. Firstly, a steady-flux negative ion beam ( NIB ) of the desired chemical species generated by the high 0 100 current density negative ion source is purified at the mass separator LB Then, immediately after it is decelerated to the desired kinetic energy and made convergent by the triple-electrode decelerator at Fig.!.…”