2000
DOI: 10.1116/1.1319838
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Comparison of infrared frequency selective surfaces fabricated by direct-write electron-beam and bilayer nanoimprint lithographies

Abstract: Articles you may be interested inLossless layout image compression algorithms for electron-beam direct-write lithography J. Vac. Sci. Technol. B 33, 06FD01 (2015); 10.1116/1.4927639 Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lens Nanostructure fabrication by direct electron-beam writing of nanoparticles Electron-beam lithography with metal colloids: Direct writing of metallic nanostructures

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Cited by 21 publications
(13 citation statements)
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“…[1][2][3][4][5][6][7][8] The TPV filter is used to reflect energy that cannot be converted into electricity back to the heat source thereby ''recycling'' waste heat. FSS technology has been developed over the past thirty years for use in military communications and stealth applications.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8] The TPV filter is used to reflect energy that cannot be converted into electricity back to the heat source thereby ''recycling'' waste heat. FSS technology has been developed over the past thirty years for use in military communications and stealth applications.…”
Section: Introductionmentioning
confidence: 99%
“…1 Traditionally, such MDPCs were fabricated by stacking three or more layers of micron-scale metallic patch elements with intermediate dielectric spacers to achieve structures having a single resonant stopband with requisite band rejection properties ͑Ͼ10 dB͒. [2][3][4] More recently, MDPCs consisting of a dielectric substrate supporting a single planar periodic array of metallic patch elements, such as coupled 5 or uncoupled 6 dipoles, cross-dipoles, 7 and rings, 8 have also been demonstrated.…”
mentioning
confidence: 99%
“…Furthermore, the resonant frequency can be tuned by the strain change in the copolymer films. 7 In general, 2D micro/submicroscale metallic patterns for FSSs are obtained by photolithography techniques, such as UV lithography, 8 electron-beam lithography, 3,[9][10][11] soft lithography, 12 and microlens projection lithography. A surface on which two-dimensional (2D) metallic patches or aperture elements are regularly arrayed, the socalled frequency selective surface (FSS), provides a method for constructing optical filters from a single layer of metallic structure.…”
Section: Fabrication Of Strain Tunable Infrared Frequency Selective Smentioning
confidence: 99%