2020
DOI: 10.1088/1361-6595/ab6c81
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Comparison of electron heating and energy loss mechanisms in an RF plasma jet operated in argon and helium

Abstract: The μ-APPJ is a well-investigated atmospheric pressure RF plasma jet. Up to now, it has mainly been operated using helium as feed gas due to stability restrictions. However, the COST-Jet design including precise electrical probes now offers the stability and reproducibility to create equi-operational plasmas in helium as well as in argon. In this publication, we compare fundamental plasma parameters and physical processes inside the COST reference microplasma jet, a capacitively coupled RF atmospheric pressure… Show more

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Cited by 28 publications
(55 citation statements)
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“…This change is induced by a change from the so-called α-mode to the γ-mode as already observed and discussed e.g. for the COST-Jet by Golda et al [12]. A change of the plasma emission from a homogeneous glow in the middle between the electrodes to a bright emission directly at both electrodes is observed in this power region.…”
Section: Power Supply and Power Measurementsupporting
confidence: 71%
“…This change is induced by a change from the so-called α-mode to the γ-mode as already observed and discussed e.g. for the COST-Jet by Golda et al [12]. A change of the plasma emission from a homogeneous glow in the middle between the electrodes to a bright emission directly at both electrodes is observed in this power region.…”
Section: Power Supply and Power Measurementsupporting
confidence: 71%
“…Similar trends and values are obtained for the RF COST reference microplasma jet operating in the abnormal or α-mode with an inter-electrode gap distance of 1 mm. 60 An independent estimate of T e can be obtained from the power balance. Assuming momentum transfer from electrons to neutrals by elastic collisions as the dominant loss mechanism, the input electrical power density, P/V [W m −3 ] can be written as follows 44…”
Section: Resultsmentioning
confidence: 99%
“…The volume-averaged electron density in a He COST-Jet is reported by Golda et al [46]. The plasma is operated at a net mass flow rate of 1000 sccm and a pressure of 99000 Pa.…”
Section: Benchmark Against Measurements and Simulation Resultsmentioning
confidence: 93%
“…The irreproducible experimental results of a µAPPJ are mainly ascribed to the gas impurity and the power uncertainty. Hence, they are minimized by the COST-Jet [46,51] with a large amount of effort [28] (e.g., the sealing improvement and the absorbed power measurements with integrated probes).…”
Section: Setupmentioning
confidence: 99%