Comparison of CoSi2 interconnection lines on crystalline and noncrystalline silicon fabricated by writing focused ion beam implantation

In this article, the authors review, compare, and discuss the characteristics and applicative potential of a variety of nongallium ion liquid metal ion sources they have developed and successfully applied to nanopatterning. These sources allow generating on-demand ion beams and are promising for extending focused ion beams applications. They detail the operating characteristics of such sources capable to emit metal projectiles ranging from atomic ions with different charge states to polyatomic ions and to large metal clusters having sizes up to a few nanometers. They highlight their interest and relevance to current nanoscience challenges in terms of ultimate patterning or bottom-up nanofabrication capabilities.

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Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

Giérak

Mazarov

Bruchhaus

et al. 2018

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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Comparison of CoSi2 interconnection lines on crystalline and noncrystalline silicon fabricated by writing focused ion beam implantation

Cited by 1 publication

References 9 publications

Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

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