Comparison of bonding procedures for 3D-structured polyimide films on silicon substrates applied to ink-jet cartridges

Goettsche, T.; Ruddy, C.; Heller, U.; Stehr, Micael; Ashauer, H.; Lindemann, T.; Koltay, Peter; Yu, Ying; Peters, Ralf-Peter; Soriani, P.; Bellone, A.

doi:10.1007/s00170-006-0709-x

Cited by 2 publications

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References 3 publications

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“…Known thick film laminate technologies, based on heat and pressure sensitive films allow for the simple stacking of individual electrode array layers and should result in a straightforward 3D array structure. [37][38][39][40] The large size of Xenopus Oocytes allowed the use of simple electrode fabrication techniques, but technology is already available to fabricate micron-sized metal electrodes that surround 10 mm diameter cells. 18,26,32 Furthermore, electron-beam and ion-beam lithography have been used to construct nanometer-sized electrodes that can analyze DNA sequences and detect glucose containing analytes.…”

Section: Discussionmentioning

confidence: 99%

Single cell electric impedance topography: Mapping membrane capacitance

2009

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Single-cell electric impedance topography (sceTopo), a technique introduced here, maps the spatial distribution of capacitance (i.e. displacement current) associated with the membranes of isolated, living cells. Cells were positioned in the center of a circular recording chamber surrounded by eight electrodes. Electrodes were evenly distributed on the periphery of the recording chamber. Electric impedance measured between adjacent electrode pairs (10 kHz–5 MHz) was used to construct topographical maps of the spatial distribution of membrane capacitance. Xenopus Oocytes were used as a model cell to develop sceTopo because these cells consist of two visually distinguishable hemispheres, each with distinct membrane composition and structure. Results showed significant differences in the imaginary component of the impedance between the two oocyte hemispheres. In addition, the same circumferential array was used to map the size of the extracellular electrical shunt path around the cell, providing a means to estimate the location and shape of the cell in the recording chamber.

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Section: Discussionmentioning

confidence: 99%

Single cell electric impedance topography: Mapping membrane capacitance

2009

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“…We assume that the part of the fiber that the stage has to support has a length of 1 cm, where we would install an additional stage for relieving a mechanical strain to the main fiber stage or applying an additinoal feedback voltage to stabilize the cavity frequency. The mass of glue is neglected [79].…”

Section: Mass Of the Fiber Stagementioning

confidence: 99%

Microelectromechanical-System-Based Design of a High-Finesse Fiber Cavity Integrated with an Ion Trap

Lee

Hong

et al. 2019

Phys. Rev. Applied

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We present a numerical study of a MEMS-based design of a fiber cavity integrated with an ion trap system. Each fiber mirror is supported by a microactuator that controls the mirror's position in three dimensions. The mechanical stability is investigated by a feasibility analysis showing that the actuator offers a stable support of the fiber. The actuators move the fibers' positions continuously with a stroke of more than 10 µm, with mechanical resonance frequencies on the order of kHz. A calculation of the trapping potential shows that a separation between ion and fiber consistent with strong ion-cavity coupling is feasible. Our miniaturized ion-photon interface constitutes a viable approach to integrated hardware for quantum information. * These authors contributed equally to this work. † tracy.northup@uibk.ac.at ‡ dicho@snu.ac.kr Au electrodes on fused silica. A MEMS surface ion trap has smaller trap depth than a three-dimensional Paul trap [19] but has the advantage of a reconfigurable planar trapping geometry, along with extensive optical access for laser beams, as required for a large-scale ion trap quantum computer. In 2016, a MEMS trap called the High Optical Access 2.0 trap was developed by Sandia National Laboratory [20], which is widely used by many ion trap researchers today. Topics of active research include the question of how to reduce stray charge accumulation, e.g., on the trap sidewalls [21] or via in situ cleaning [22,23], and how to build increasingly sophisticated structures, e.g., junction traps [24,25] for ion transport, and two-or three-dimensional electrode arrays [26,27].MEMS-based ion traps have advantages in scalability and ease of fabrication, and they can also be easily integrated with other type of MEMS devices. MEMS techniques can also reduce the footprint of the optical cavity system [28,29], particularly for the mirror actuators. The replacement of standard high-finesse mirrors by fiber mirrors has already reduced the physical cavity volume significantly [30,31]; however, when commercial nanopositioning stages are used, they place significant space demands on the in-vacuum assembly. Here, we propose and investigate a novel design for a MEMS-based fibercavity system integrated with a surface ion trap. The fiber system is studied by analyzing the mechanical stability, resonances, and stroke. Furthermore, we calculate the trapping potential seen by the ions in order to discuss the prospects for strong ion-cavity coupling. II. BASIC CONCEPTThe main structure consists of a surface ion trap integrated with a MEMS-based fiber cavity system ( Fig. 1(a)). The starting point is a microfabricated chip, arXiv:1907.07594v1 [quant-ph]

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Comparison of bonding procedures for 3D-structured polyimide films on silicon substrates applied to ink-jet cartridges

Cited by 2 publications

References 3 publications

Single cell electric impedance topography: Mapping membrane capacitance

Single cell electric impedance topography: Mapping membrane capacitance

Microelectromechanical-System-Based Design of a High-Finesse Fiber Cavity Integrated with an Ion Trap

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