2020
DOI: 10.1109/jsen.2020.2985969
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Comparison of Analytical and Numerical Methods of Obtaining Coplanar Capacitance of Microelectrodes for Particulate Matter Detection

Abstract: This work reports a comparative analysis between the analytical and the finite element modelling, for the calculation of the capacitance of microelectrode-based capacitors in both parallel and coplanar architecture. It shows that the inverse-cosine and the Schwartz-Christoffel methods underestimate the capacitance value of the coplanar plate capacitor. It also shows that the parallel architecture closed form solution and the finite element modelling results agree well in all cases. The work finally compares th… Show more

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Cited by 9 publications
(3 citation statements)
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“…It states that the electrode gap must be at least bigger than the size of the largest particle size which is in nm size. [17]. D. Back, D. Theisen, W. Seo, C. S. J. Tsai, and D. B. Janes in 2020 designed a high resolution interdigital capacitive sensor to detect nanoscale particulate matter for mining and another environment like dust.…”
Section: An Efficient Mems Sensor Modelling Bymentioning
confidence: 99%
“…It states that the electrode gap must be at least bigger than the size of the largest particle size which is in nm size. [17]. D. Back, D. Theisen, W. Seo, C. S. J. Tsai, and D. B. Janes in 2020 designed a high resolution interdigital capacitive sensor to detect nanoscale particulate matter for mining and another environment like dust.…”
Section: An Efficient Mems Sensor Modelling Bymentioning
confidence: 99%
“…Notably, Influenza A viruses with uncleaved HA exhibit greater stability, maintaining infectivity at pH values lower than 4.5, in contrast to viruses with cleaved HA, which lose infectivity at a pH lower than 5 [3]. Knowing that PM could be a carrier for airborne pathogens, the integration of a bespoke biosensor with a particulate matter detection platform, combines pathogen detection with air quality monitoring [4,5] in a novel way and provides a more comprehensive understanding of air quality and health risks.…”
Section: Introductionmentioning
confidence: 99%
“…A model based on a MEMS capacitive sensor demonstrated that finite element analysis is the most accurate technique for estimating sensor capacitance [20]. Interdigitated capacitive sensors were used in mining environments to monitor real-time nanoscale particle concentrations, with simulations indicating that the sensor response is proportional to the number of particles accumulated on the sensor [21].…”
Section: Introductionmentioning
confidence: 99%