Comparison between beryllium-copper and tungsten high frequency air coplanar probes

Carbonero, J.L.; Morin, Gérard; Cabon, B.

doi:10.1109/22.475636

Cited by 32 publications

(13 citation statements)

References 19 publications

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“…To ensure a good contact before the measurements started, the precautions described in ref. 7, like correct overtravel, were taken into account. Besides, initial measurements were found to be reproducible for multiple structures on the same chip.…”

Section: Measurement Resultsmentioning

confidence: 99%

“…The reader should keep in mind that the drain-source series resistance of an RF MOSFET test structure is only a few ohm (1.6 in our case) which is quickly exceeded by the probe-pad contact resistance if an oxide layer builds up. For a clean aluminium pad, the contact resistance between an RF probe and the aluminium pad is approximately 0.2-0.3 [7], but this can increase easily to a few , as was shown in the previous section.…”

Section: Guidelines To Prevent Degradation Of Contact Resistancementioning

confidence: 90%

“…For example, in this study the total drain-source series resistance of the MOSFET is 1.6 . The contact resistance between an RF probe and the aluminium pad is 0.2 for a good contact [7]. However, if no special precautions are taken, the contact resistance can easily increase to a few ohm as time progresses and can influence the electrical characteristics of the MOSFET significantly as was shown in the previous section.…”

Section: Rf Mosfet Test Structurementioning

confidence: 94%

“…In our structures, the metal contact pads are made of aluminium, which oxidizes very quickly when exposed to air. After a few hours, the oxide thickness is already more than half the natural oxide thickness of 50 to 100 Å [7]. Initially, the RF probe tip is punched through this native oxide layer to make an ohmic contact.…”

Section: Guidelines To Prevent Degradation Of Contact Resistancementioning

confidence: 99%

See 3 more Smart Citations

Impact of probe-to-pad contact degradation on the high frequency characteristics of RF MOSFETs and guidelines to avoid it

Vandamme

Schreurs

Dinther

2001

Int J RF and Microwave Comp Aid Eng

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Apparent degradation of the RF characteristics of silicon MOSFETs was observed under normal operating conditions. We show that it was not caused by intrinsic device degradation but originated from a degradation of the contact resistance between probe and bonding pad. Guidelines, not limited to MOSFETs only, are given that enable accurate S-parameter measurements for RF modelling and reliability assessment.

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Section: Measurement Resultsmentioning

confidence: 99%

Section: Guidelines To Prevent Degradation Of Contact Resistancementioning

confidence: 90%

Section: Rf Mosfet Test Structurementioning

confidence: 94%

Section: Guidelines To Prevent Degradation Of Contact Resistancementioning

confidence: 99%

See 2 more Smart Citations

Impact of probe-to-pad contact degradation on the high frequency characteristics of RF MOSFETs and guidelines to avoid it

Vandamme

Schreurs

Dinther

2001

Int J RF and Microwave Comp Aid Eng

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“…Thus, the total thickness of the specimen used in this experiment is 46 µm. BeCu is a copper alloy with 1.8~2% beryllium and has been used intensively in DC probing [25]. The configuration of the experimental equipment is shown in Figure 1.…”

Section: Materials and Experimental Methodsmentioning

confidence: 99%

Experimental Investigation of Laser Ablation Characteristics on Nickel-Coated Beryllium Copper

Lee

2018

Metals

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Abstract:As electronic products are miniaturized, the components of the spring contact probe are made very fine. Current mechanical processing may make it difficult to perform micro-machining with a high degree of precision. A laser is often used for the high precision micro-machining due to its advantages such as a contact-free process, high energy concentration, fast processing time, and applicability to almost every material. The production of micro-electronics using nickel-coated copper is rapidly increasing and laser material processing is becoming a key processing technology owing to high precision requirements. Before applying laser material processing, it is necessary to understand the ablation characteristics of the materials. Therefore, this study systematically investigates the ablation characteristics of nickel-coated beryllium copper. Key laser parameters are pulse duration (4~200 ns) and the total accumulated energy (1~1000 mJ). The processed workpiece is evaluated by analyzing the heat affected zone (HAZ), material removal zone (MRZ), and roundness. Moreover, the surface characteristics such as a burr, spatter, and roundness shapes are analyzed using scanning electron microscope (SEM).

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Fabrication of system with probe for high‐frequency measurement applications

Matsumoto

Choi

Tomokage

2010

Micro & Optical Tech Letters

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that of printed-spiral-strip antenna reported in [3], cross patchloaded square slot antenna reported in [5] and spidron fractal slot antenna presented in [6]. Figure 5 shows the simulated radiation patterns in the x-z and y-z planes at 4 GHz. Radiation pattern of the proposed antenna is bidirectional and broadside. Also it can be seen that in the þz-direction the proposed antenna is left hand circular polarized, while on the contrary, in the Àzdirection the radiated field is right-hand circular polarized. CONCLUSIONIn this letter, a new wideband circularly polarized antenna that consists of a quasi-spiral slot is studied. A simple 50 X microstrip line is used to excite the slot antenna. Radiation characteristics of the antenna are investigated experimentally and by numerical simulations. In accordance to simulated and measured results, the proposed antenna can provide a large bandwidth for impedance matching and circular polarization radiation. Measured bandwidths for S 11 < À10 dB and axial ratio <3 dB are 87 and 43%, respectively, which are greater than those reported in [3, 5, 6]. ACKNOWLEDGMENTThe authors thank Iran Telecommunication Research Center (ITRC) for financial support of this research.ABSTRACT: In this study, a new type of low temperature co-fired ceramic (LTCC) probes fabricated using the system-in-package (SiP) technology is proposed; these probes are used for high-frequency measurements. The advantage of LTCC probes is that suitable structures of the metal tips of their electrodes can be easily created by cutting LTCC sheets during the fabrication process.

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Comparison between beryllium-copper and tungsten high frequency air coplanar probes

Cited by 32 publications

References 19 publications

Impact of probe-to-pad contact degradation on the high frequency characteristics of RF MOSFETs and guidelines to avoid it

Impact of probe-to-pad contact degradation on the high frequency characteristics of RF MOSFETs and guidelines to avoid it

Experimental Investigation of Laser Ablation Characteristics on Nickel-Coated Beryllium Copper

Fabrication of system with probe for high‐frequency measurement applications

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