Comparing Different Output Metrics of High-Resolution MEMS Weakly Coupled Resonant Tilt Sensors

Wang, Kunfeng; Xiong, Xingyin; Zheng, Wanhua; Wang, Bowen; Ma, Liangbo; Zou, Xudong

doi:10.1109/jsen.2023.3244564

Cited by 3 publications

(4 citation statements)

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“…The mechanical configuration of the mode-localized tilt sensor comprises a proof mass supported by four suspensions, a pair of differential microlever force amplifiers, two identical clamped-clamped (C–C) resonators connected by a mechanical microlever coupling structure, and a virtual electrostatic tuning structure, as shown in Fig. 1a , b 25 , 26 . The dimensions of the mode-localized tilt sensor are provided in Supplementary Materials Table I .…”

Section: Resultsmentioning

confidence: 99%

“…Utilizing the DD noise analysis model to improve the amplitude noise, the optimal operating point exhibits better low-frequency noise performance. In our previous work 26 , the optimal operating point for white noise of the mode-localized tilt sensor is determined by the amplitude ratio as approximately 1.22. The amplitude ratios of the PSD and modified Allan deviation are calculated, and the results are shown in Fig.…”

Section: Resultsmentioning

confidence: 99%

“…Modelocalized sensors also exhibit excellent common-mode rejection of environmental temperature and pressure variations due to their identical coupled resonators 20 . These properties make mode-localized sensors ideal for detecting various physical parameters, such as displacement 21 , charge 22,23 , acceleration 14,24,25 , and tilt [26][27][28] .…”

Section: Introductionmentioning

confidence: 99%

“…Related studies on the optimal operating points for the different output metrics of the coupled resonators were previously shown for the special condition of amplitude ratio (AR) of approximately 1.23 and amplitude difference of approximately 0.23, i.e., near the veering point 26,32 . Hemin Zhang's research suggests that the optimal operational amplitude approaches the critical amplitude, at which the sensor exhibits superior noise floor performance and enhanced stability 36 .…”

Section: Introductionmentioning

confidence: 99%

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A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

Wang,

Xiong,

Wang

et al. 2023

Microsyst Nanoeng

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The development of mode-localized sensors based on amplitude output metrics has attracted increasing attention in recent years due to the potential of such sensors for high sensitivity and resolution. Mode-localization phenomena leverage the interaction between multiple coupled resonant modes to achieve enhanced performance, providing a promising solution to overcome the limitations of traditional sensing technologies. Amplitude noise plays a key role in determining the resolution of mode-localized sensors, as the output metric is derived from the measured AR (amplitude ratio) within the weakly coupled resonator system. However, the amplitude noise originating from the weakly coupled resonator’s closed-loop circuit has not yet been fully investigated. This paper presents a decouple-decomposition (DD) noise analysis model, which is applied to achieve high resolution in a mode-localized tilt sensor based on a weakly coupled resonator closed-loop circuit. The DD noise model separates the weakly coupled resonators using the decoupling method considering the nonlinearity of the resonators. By integrating the decoupled weakly coupled resonators, the model decomposes the weakly coupled resonator’s closed-loop circuit into distinct paths for amplitude and phase noise analyses. The DD noise model reveals noise effects at various circuit nodes and models the system noise in the closed-loop circuit of the weakly coupled resonators. MATLAB/Simulink simulations verify the model’s accuracy when compared to theoretical analysis. At the optimal operating point, the mode-localized tilt sensor achieves an input-referred instability of 3.91 × 10-4° and an input-referred AR of PSD of 2.01 × 10-4°⁄√Hz using the closed-loop noise model. This model is also applicable to other varieties of mode-localized sensors.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%