A sample series of silica sonogels was prepared using different water-tetraethoxysilane molar ratio ͑r w ͒ in the gelation step of the process in order to obtain aerogels with different bulk densities after the supercritical drying. The samples were analyzed by means of small-angle x-ray-scattering ͑SAXS͒ and nitrogen-adsorption techniques. Wet sonogels exhibit mass fractal structure with fractal dimension D increasing from ϳ2.1 to ϳ 2.4 and mass-fractal correlation length diminishing from ϳ13 nm to ϳ 2 nm, as r w is changed in the nominal range from 66 to 6. The process of obtaining aerogels from sonogels and heat treatment at 500°C, in general, increases the mass-fractal dimension D, diminishes the characteristic length of the fractal structure, and shortens the fractal range at the micropore side for the formation of a secondary structured particle, apparently evolved from the original wet structure at a high resolution level. The overall mass-fractal dimension D of aerogels was evaluated as ϳ2.4 and ϳ2.5, as determined from SAXS and from pore-size distribution by nitrogen adsorption, respectively. The fine structure of the "secondary particle" developed in the obtaining of aerogels could be described as a surface-mass fractal, with the correlated surface and mass-fractal dimensions decreasing from ϳ2.4 to ϳ 2.0 and from ϳ2.7 to ϳ 2.5, respectively, as the aerogel bulk density increases from 0.25 ͑r w =66͒ up to 0.91 g / cm 3 ͑r w =6͒.