1997
DOI: 10.1016/s0040-6090(97)00343-x
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Comparative study of the elastic properties of polycrystalline aluminum nitride films on silicon by Brillouin light scattering

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Cited by 47 publications
(44 citation statements)
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“…Among them, 11 have an experimental character [15][16][17][18][19][20][21][22][23] and the other 34 were derived by using calculation methods . Some of these studies did not provide complete sets of C ij values, showing only C 44 [20,21] or not presenting C 12 [17] nor C 11 , C 12 and C 44 [39] values for the calculations. Note that, for a good estimation, the C 13 and C 33 assessments in Ref.…”
Section: Methodsmentioning
confidence: 99%
“…Among them, 11 have an experimental character [15][16][17][18][19][20][21][22][23] and the other 34 were derived by using calculation methods . Some of these studies did not provide complete sets of C ij values, showing only C 44 [20,21] or not presenting C 12 [17] nor C 11 , C 12 and C 44 [39] values for the calculations. Note that, for a good estimation, the C 13 and C 33 assessments in Ref.…”
Section: Methodsmentioning
confidence: 99%
“…It must be evaluated numerically, using the model of [25] and usually takes values in the range between about 0.9 and 0.95. The exact value of β can be found according to the following implicit expression derived by Dobrzynski and Maradudin [26]: Let us now consider the latter (more complex) case that has been considered in previous investigations devoted, for instance, to ZnO [22] or AlN [23,24] films. Using different angles of incidence and a careful polarization analysis of the scattered light, one can detect and identify several guided acoustic modes [25], such as the surface Rayleigh wave (RW), the shear horizontal mode (SHM), the longitudinal mode (LM) and the longitudinal bulk (LB) mode, whose propagation direction and polarization are summarized in Figure 3.…”
Section: Transparent Films With Micrometric Thickness: Guided Modes Amentioning
confidence: 99%
“…Among these structures, there are some notable properties that highlight AlN. Its bulk wurtzite structure has a wide band gap ($6.2 eV) and has high surface acoustic wave (SAW) velocity [15,16], so it is an ideal material for blue-tooth and wireless communications devices. On the other hand, it has low thermal expansion coefficient and high thermal conductivity.…”
Section: Introductionmentioning
confidence: 99%