2001
DOI: 10.1143/jjap.40.l323
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Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-on-Glass Films Using Different Methods of Nondestructive Instrumentation

Abstract: We consider whether the non-Gaussian scale-dependent halo bias can be used not only to constrain the local form of non-Gaussianity but also to distinguish among different shapes. In particular, we ask whether it can constrain the behavior of the primordial threepoint function in the squeezed limit where one of the momenta is much smaller than the other two. This is potentially interesting since the observation of a three-point function with a squeezed limit that does not go like the local nor equilateral templ… Show more

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Cited by 46 publications
(35 citation statements)
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“…Mesoporous silica has been intensively studied in the last two decades due to the simplicity of their synthesis [1] and for their numerous applications including low-k dielectrics [2][3][4], photocatalysis [5], optical materials [2,3,6], thermal insulation [7], optical data storage [8], corrosion-resistant catalyst supports [9], as well as drug delivery and biosensors [10][11][12]. Those materials can assume various shapes such as spheres, fibers, and thin-films [1].…”
Section: Introductionmentioning
confidence: 99%
“…Mesoporous silica has been intensively studied in the last two decades due to the simplicity of their synthesis [1] and for their numerous applications including low-k dielectrics [2][3][4], photocatalysis [5], optical materials [2,3,6], thermal insulation [7], optical data storage [8], corrosion-resistant catalyst supports [9], as well as drug delivery and biosensors [10][11][12]. Those materials can assume various shapes such as spheres, fibers, and thin-films [1].…”
Section: Introductionmentioning
confidence: 99%
“…For more accurate pore size determination, as mentioned above, calibration between o-Ps lifetimes and pore sizes for thin films must be accomplished. An international round robin test of various porous low-k films was performed by the groups of University Yamanashi, IMEC (Belgium), NIST (USA) and University Michigan (USA) to compare the results of PAL, small angle neutron scattering, ellipsometric porosimetry, and conventional gas adsorption [17].…”
Section: Positronium Annihilation Lifetimementioning
confidence: 99%
“…4 The pore size should be carefully controlled and should be smaller than the minimum features size to achieve mechanical stability. 5 It is also preferable to have a homogenous pore size distribution to prevent k anisotropy. Thus, characterizations of porous films are becoming crucial and increasingly difficult.…”
Section: Introductionmentioning
confidence: 99%