Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging

Rack, Alexander; Weitkamp, Timm; Riotte, M.; Grigoriev, D.; Rack, T.; Helfen, Lukas; Baumbach, Tilo; Dietsch, R.; Holz, Thomas; Krämer, M.; Siewert, Frank; Meduňa, Mojmír; Cloetens, Peter; Ziegler, Eric

doi:10.1107/s0909049510011623

Cited by 85 publications

(59 citation statements)

References 71 publications

(71 reference statements)

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“…The average over the field of view was μ n = (13.35 ± 0.08) bit. While the horizontal stripes in the image are due to surface roughness of the monochromator [33], vertical stripes are caused by imperfections of the gratings. The factor χ (Eq.…”

Section: Modelization Of Noisementioning

confidence: 99%

Sensitivity of X-ray grating interferometry

et al. 2011

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It is known that the sensitivity of X-ray phase-contrast grating interferometry with regard to electron density variations present in the sample is related to the minimum detectable refraction angle. In this article a numerical framework is developed that allows for a realistic and quantitative determination of the sensitivity. The framework is validated by comparisons with experimental results and then used for the quantification of several influences on the sensitivity, such as spatial coherence or the number of phase step images. In particular, we identify the ideal inter-grating distance with respect to the highest sensitivity for parallel beam geometry. This knowledge will help to optimize existing synchrotron-based grating interferometry setups. Abstract: It is known that the sensitivity of X-ray phase-contrast grating interferometry with regard to electron density variations present in the sample is related to the minimum detectable refraction angle. In this article a numerical framework is developed that allows for a realistic and quantitative determination of the sensitivity. The framework is validated by comparisons with experimental results and then used for the quantification of several influences on the sensitivity, such as spatial coherence or the number of phase step images. In particular, we identify the ideal intergrating distance with respect to the highest sensitivity for parallel beam geometry. This knowledge will help to optimize existing synchrotron-based grating interferometry setups. References and links1. U. Bonse and M. Hart, "An X-ray interferometer," Appl. Phys. Lett. 6, 155-156 (1965). 2. A. Momose, T. Takeda, Y. Itai, and K. Hirano, "Phase-contrast x-ray computed tomography for observing biological soft tissues," Nat. Med. 2, 473-475 (1996). 3. A. Yoneyama, T. Takeda, Y. Tsuchiya, J. Wu, T.-T. Lwin, A. Koizumi, K. Hyodo, and Y. Itai, "A phase-contrast X-ray imaging system-with a 60 x 30 mm field of view based on a skew-symmetric two-crystal X-ray interferometer," Nucl. Instrum. Methods Phys. Res. A 523, 217-222 (2004). 4. A. Snigirev, I. Snigireva, V. Kohn, S. Kuznetsov, and I. Schelokov, "On the possibilities of x-ray phase contrast microimaging by coherent high-energy synchrotron radiation," Rev. Sci. Instrum. 66, 5486-5492 (1995). 5. P. Cloetens, R. Barrett, J. Baruchel, J.-P. Guigay, and M. Schlenker, "Phase objects in synchrotron radiation hard x-ray imaging," J.

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Section: Modelization Of Noisementioning

confidence: 99%

Sensitivity of X-ray grating interferometry

et al. 2011

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“…In detail, the beam profile after reflection as well as the coherence properties of the reflected beam where investigated [15]. The results have already been used in the specifications of a double-multilayer monochromator for the TopoTomo beamline of the ANKA light source (Germany) [16][17][18].…”

Section: Synchrotron Hard X-ray Imaging Performancementioning

confidence: 99%

Performance of Multilayer Monochromators for Hard X-Ray Imaging with Coherent Synchrotron Radiation

Dietsch¹,

Rack²,

Weitkamp³

et al. 2011

AIP Conference Proceedings

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“…[170][171][172] For imaging systems, periodicity control of the multilayers becomes critical when narrow band sources like FELs are used or in the case of the latest lithography optics with high numerical apertures. Multilayer gratings with both ultrahigh spectral resolution and high efficiency are required to resolve the different elementary excitations in matters.…”

Section: Prospectsmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Comparative study of multilayers used in monochromators for synchrotron-based coherent hard X-ray imaging

Cited by 85 publications

References 71 publications

Sensitivity of X-ray grating interferometry

Sensitivity of X-ray grating interferometry

Performance of Multilayer Monochromators for Hard X-Ray Imaging with Coherent Synchrotron Radiation

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

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