2010
DOI: 10.1007/s11664-010-1378-y
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Comparative Studies of Carrier Dynamics in 3C-SiC Layers Grown on Si and 4H-SiC Substrates

Abstract: Time-resolved nonlinear optical techniques were applied to determine the electronic parameters of cubic silicon carbide layers. Carrier lifetime, s, and mobility, l, were measured in a free-standing wafer grown on undulant Si and an epitaxial layer grown by hot-wall chemical vapor deposition (CVD) on a nominally on-axis 4H-SiC substrate. Nonequilibrium carrier dynamics was monitored in the 80 K to 800 K range by using a picosecond free carrier grating and free carrier absorption techniques. Correlation of s(T)… Show more

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Cited by 19 publications
(14 citation statements)
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References 24 publications
(26 reference statements)
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“…The LPV as a function of laser position data in figure 3(c) can be fitted into equation ( 8) [48]. For instance, with 500 µm-spacing device under 637 nm and 980 nm (100 µW) illumination, the data can be fitted with L = 250 µm and L h = 2.3 µm [49]. The fitting result is shown in figure S4, with the fitted values of K for 637 nm and 980 nm are 0.981 and 0.982, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The LPV as a function of laser position data in figure 3(c) can be fitted into equation ( 8) [48]. For instance, with 500 µm-spacing device under 637 nm and 980 nm (100 µW) illumination, the data can be fitted with L = 250 µm and L h = 2.3 µm [49]. The fitting result is shown in figure S4, with the fitted values of K for 637 nm and 980 nm are 0.981 and 0.982, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The τ G values were estimated on basis of the measured carrier lifetimes τ R in 0.5 ns -1 µs range [2,16] and diffusive decay times τ D > 230 ps for used period Λ = 2.85 µm (the D values for 3C SiC varied in 1.5 -9 cm 2 /s interval with temperature [4], and similarly in the other polytypes). Therefore diffraction efficiency value if measured at the end of laser pulse (t ≈ 20 ps) was not affected by the grating decay and reflected the instantaneus values of ∆n.…”
Section: Samplesmentioning
confidence: 99%
“…A deeper understanding of these processes in high-density carrier plasma can be obtained by applying time-resolved optical techniques, which allow the injection of an excess carriers by a short laser pulse and subsequent monitoring of the recombination and diffusion processes [1][2][3][4][5][6][7]. Therefore knowledge of absorption coefficent at commonly used laser wavelengths is an important issue for more precise determination of injected carrier density profile and related plasma parameters in SiC, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Lifetime decrease with nitrogen doping, not correlating with the Z 1/2 trap density, was also observed in [7]. The recombination mechanisms when intrinsic Z 1/2 trap density is negligibly low are often attributed to surface recombination, dislocations and stacking faults [8][9][10][11]. Few works also indicate that other point defects cannot be neglected [2,12].…”
Section: Introductionmentioning
confidence: 96%