Comparative evaluation of detachable mold fixing methods aimed at low energy loss for ultrasonic nanoimprint lithography

Mekaru, Harutaka; Yano, Takayuki

doi:10.1007/s00542-016-3028-7

Cited by 4 publications

(2 citation statements)

References 32 publications

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“…The aspect ratio can be up to 28 using the micromolding into capillaries (MIMIC) process with ultraviolet-curing technology. 8 Moreover, by taking the auxiliary systems into account, NIL can be subdivided into but not limited to pressure-assisted, 9 laser-assisted, 10 electrostatic-assisted, 11 ultrasonic-assisted, 12 electromagnetic force-assisted, 13 stepping flash nanoimprinting, 14 and single-step wafer imprinting. 15 Plate-to-plate nanoimprint lithography (P2P-NIL) suffers from a few major disadvantages, which limit its utility in largescale, continuous imprinting.…”

Section: Introductionmentioning

confidence: 99%

Continuous roller nanoimprinting: next generation lithography

Peng¹,

Zhang²,

Choi³

et al. 2023

Nanoscale

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Section: Introductionmentioning

confidence: 99%

Continuous roller nanoimprinting: next generation lithography

Peng¹,

Zhang²,

Choi³

et al. 2023

Nanoscale

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“…It has been shown that the cycle time of hot embossing micro structures from thermoplastic polymers can be shortened to some seconds if the polymer is heated by ultrasonic vibrations instead of heating up the entire tool (Sackmann et al 2015;Lee and Park 2016;Š akalys et al 2016;Mekaru and Yano 2016;Zhu et al 2017;Liu et al 2018). Obviously, the polymer is held longer at an elevated temperature even when it gets into contact to a cold tool.…”

Section: Introductionmentioning

confidence: 99%

Process windows of ultrasonic thermoforming of micro structures

Peng

Schomburg

2020

Microsyst Technol

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Ultrasonic thermoforming of micro structures is similar as usual thermoforming, but the heat required for softening of the polymer is at least partly generated by ultrasonic vibrations. Cycle times as short as a few seconds are achieved by ultrasonic thermoforming and not much more than a commercially available ultrasonic welding machine is required for the process. This paper describes the process window of this fabrication process for polypropylene foils, 200 lm in thickness, as a function of preheating of the tool. Best results have been obtained at room temperature. Since the process is a function of temperature, it is concluded that production should be performed with a tool preheated to 45°C to avoid an influence by a changing room temperature. The overall size of the samples is limited by the size of the available sonotrodes. The experiments described in this paper were performed on an area of 2 9 2 cm 2 , but larger sonotrodes with an area of, e.g., 8 9 12 cm 2 could also be employed. The size of the process window is a function of both the properties of the polymer and the inclination angle of the side walls of the structures on the tools.

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