“…According to this model, we present the following relations to calculate the I 2 value of the multilayer: On the basis of the experimental results above, it is known that, in the a-Si:H sublayer of an a-Si:H/a-SiN x :H (X = 0.5) multilayer, the induced defects exist in the interface region away from the substrate, and are situated in the subregion remote from the interface, by about ≈8Å, the thickness of the subregion is L S −T S ≈ 50Å, the induced defect density can be estimated from i S 2 to be about 10 11 cm 3 , and equal to the result of electromagnetic experiment. In the other subregion which is close to the interface, its thickness is T S ≈ 8Å, and there are few or no induced defects, because the dangling bonds there can be saturated by H atoms and N atoms [8][9][10] diffused from the a-SiN x :H deposited film [11,12] during the preparation of the multilayer. This shows that the H atoms and the N atoms diffused from the a-SiN x :H deposited film can infiltrate into the a-Si:H sublayer by about 8Å.…”