As the integration
level of silicon photonics improves, using a
large number of 2 × 2 crossings is seemingly inevitable. However,
with the help of a multiports crossing, which has low crosstalk and
loss, the number of crossings can be greatly reduced, then the integration
density and routing flexibility can be enhanced. Here, we propose
and demonstrate the novel 3 × 3, 4 × 4, 5 × 5 and 6
× 6 silicon waveguide star-crossings based on self-imaging. The
star-crossings are fabrication compatible with the 180 nm commercial
CMOS process. The fabricated devices show ultralow crosstalk and insertion
loss. The crosstalk of those crossings are less than −50, −50,
−49.2, and −48 dB, respectively, in C-band. The corresponding
insertion loss are less than 0.067 dB, 0.075 dB, 0.081 and 0.133 dB,
respectively. We also propose the high performance star-crossings
with arbitrary angles, which can reduce the difficulty of the waveguide
routing and further improve the integration density of photonics IC.
The footprint and minimum angle of the proposed star-crossing are
also discussed. The crossings have high fabrication tolerance, and
will be widely used in the future integrated photonics.