Commercial and custom 160x120, 256x1, and 512x3 pixel bolometric FPAs

Pope, Timothy D.; Jerominek, Hubert; Alain, Christine; Cayer, Felix; Tremblay, Bruno; Grenier, Carol; Topart, P.; Leclair, S.; Picard, Francis; Larouche, Carl; Boulanger, Bernard; Martel, Ann; Desroches, Yan

doi:10.1117/12.478862

Cited by 19 publications

(8 citation statements)

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“…The VO x -based uncooled microbolometer detector technology developed by INO [3] and its partners has recently been shown to be well suited for remote sensing applications in the far infrared (FIR) [4]. Early prototype FPAs were manufactured and used to demonstrate the suitability of INO's technology for the BBR detectors.…”

Section: Fpa Design and Fabricationmentioning

confidence: 99%

The EarthCARE broadband radiometer detectors

et al. 2009

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The Broadband Radiometer (BBR) is an instrument being developed for the ESA EarthCARE satellite. The BBR instrument objective is to provide top-of-atmosphere (TOA) radiance measurements in two spectral channels, and over three along-track directions. The instrument has three fixed telescopes (one for each view) each containing a broadband detector. Each detector consists of an uncooled 30-pixel linear focal plane array (FPA) coated with gold black in order to ensure uniform spectral responsivity from 0.2 µm to 50 µm. The FPA is hybridized with a readout integrated circuit (ROIC) and a proximity electronics circuit-card assembly (CCA) packaged in an aluminum base plate with cover. This paper provides a technical description of the detector design and operation. Performance data at the FPA pixel level as well as unit-level test results on early prototypes of the detectors are also presented.

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Section: Fpa Design and Fabricationmentioning

confidence: 99%

The EarthCARE broadband radiometer detectors

et al. 2009

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“…INO in Canada is involved in a vanadium oxide technology development similar to those developed in USA [6]. In Japan, Mitsubishi develops with success an attractive silicon p/n junction based technology.…”

Section: Japan and Canadamentioning

confidence: 98%

IR detection with uncooled sensors

Tissot¹

2004

Infrared Physics & Technology

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“…Mixed vanadium oxides are deposited using a reactive sputtering technique to fabricate microheaters or IR bolometric detectors. These oxides 3 For optical applications such as filters or anti-reflection coatings, RLVIP (Reactive Low Voltage Ion Plating) of dielectrics is employed. Various oxides can be deposited with a higher refractive index than the one that may be achieved with other techniques and mechanical characteristics approaching those of the bulk material.…”

Section: Equipment Materials and Fabricationmentioning

confidence: 99%

Microfabrication services at INO

et al. 2003

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MEMS (Micro Electro Mechanical Systems) technology has expanded widely over the last decade in terms of its use in devices and instrumentation for diverse applications. However, access to versatile foundry services for MEMS fabrication is still limited. At INO, the presence of a multidisciplinary team and a complete tool set allow us to offer unique MEMS foundry-type services. These services include: design, prototyping, fabrication, packaging and testing of various MEMS and MOEMS devices. The design of a device starts with the evaluation of different structures adapted to a given application. Computer simulation tools, like IntelliSuite, ANSYS or custom software are used to evaluate the mechanical, optical, thermal and electromechanical performances. Standard IC manufacturing techniques such as metal, dielectric and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. In addition, some unique techniques such as on-wafer lithography by laser writing, gray-scale mask lithography, thick photoresist lithography, selective electroplating, injection moulding and UV-assisted moulding are available to customers. The hermetic packaging and a novel patented wafer-level micropackaging are also applied. This multifaceted expertise has been utilized to manufacturing of several types of MEMS devices as well as complex instruments including micromirror-type devices, microfilters, IR microbolometric detector arrays, complete cameras and multipurpose sensors.

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Commercial and custom 160x120, 256x1, and 512x3 pixel bolometric FPAs

Cited by 19 publications

References 0 publications

The EarthCARE broadband radiometer detectors

The EarthCARE broadband radiometer detectors

IR detection with uncooled sensors

Microfabrication services at INO

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