Abstract:International audienceThis work is devoted to the study of the Bohm criterion in the general case of the electron energy distribution function (EEDF). Investigations are performed by means of a Monte Carlo integration method. We resolve the cold fluid equation system describing the ion motion within the sheath, assuming collisionless conditions, singly charged and mono kinetic incoming ions (BOHM model). Results confirm that the limit ion velocity at the sheath edge to assure a monotone electric field with a p… Show more
“…However, the large difference between the electron density values calculated by integrating over EEDF and using the classical method is probably partly due to an error (10)) corresponding to the best adjustment (thin black) is also shown on ion velocity at the sheath edge depending on the low-energy part of the EEDF. [14] This is equal to √ kT e M i only in the case of a Maxwellian distribution.…”
Section: Application To Experimental Examplesmentioning
confidence: 99%
“…So, a third equation is needed to determine these parameters. Considering the equality between the ion and electron flux impinging on an elementary probe area in the case of homogeneous plasmas and isotropic EEDF, the equality between the absolute value of the ion and the electron current collected at the floating potential [14] can be written as…”
Section: Applicationmentioning
confidence: 99%
“…The demonstration is given in Ref. [14] . It correlates the floating potential to the ion current collected.…”
Section: Applicationmentioning
confidence: 99%
“…, and kT e is determined using the semi-logarithm equation ln [2,7] The results are also compared with the electron density (n es ) and mean energy ( es ) determined by means of single probes (using Equations (14) and (15)) located at the same place as the double probes in plasma. The relative errors on the electron density and mean energy values have been calculated using the Student statistic law for a set of 13 experiments.…”
Section: Application To Experimental Examplesmentioning
A theoretical study of the floating double probe based on the Druyvesteyn theory is developed in the case of non-Maxwellian electron energy distribution functions (EEDFs). It is used to calculate the EEDF in the electron energy range larger than -e(V f − V p ) from the I-V double probe characteristics. V f and V p are the floating and plasma potential, respectively. The analytical distribution function corresponding to the best fit of EEDF in the energy range larger than e(V f − V p ) allows the determination of the total electron density (n e ) and the mean electron energy (< e >).The method is detailed and tested in the case of a theoretical Maxwell-Boltzmann distribution function. It is applied for experiments that are performed in expanding microwave plasmas sustained in argon. Analytical EEDFs determined by this method are compared with those measured by means of single probes under the same experimental conditions. A good agreement is observed between single and double probe measurements. Results obtained under different experimental conditions are used to define the best conditions to obtain reliable results by means of the double probe technique.
KEYWORDSelectron energy distribution function, electrostatic double probe, non-Maxwellian plasma 1
“…However, the large difference between the electron density values calculated by integrating over EEDF and using the classical method is probably partly due to an error (10)) corresponding to the best adjustment (thin black) is also shown on ion velocity at the sheath edge depending on the low-energy part of the EEDF. [14] This is equal to √ kT e M i only in the case of a Maxwellian distribution.…”
Section: Application To Experimental Examplesmentioning
confidence: 99%
“…So, a third equation is needed to determine these parameters. Considering the equality between the ion and electron flux impinging on an elementary probe area in the case of homogeneous plasmas and isotropic EEDF, the equality between the absolute value of the ion and the electron current collected at the floating potential [14] can be written as…”
Section: Applicationmentioning
confidence: 99%
“…The demonstration is given in Ref. [14] . It correlates the floating potential to the ion current collected.…”
Section: Applicationmentioning
confidence: 99%
“…, and kT e is determined using the semi-logarithm equation ln [2,7] The results are also compared with the electron density (n es ) and mean energy ( es ) determined by means of single probes (using Equations (14) and (15)) located at the same place as the double probes in plasma. The relative errors on the electron density and mean energy values have been calculated using the Student statistic law for a set of 13 experiments.…”
Section: Application To Experimental Examplesmentioning
A theoretical study of the floating double probe based on the Druyvesteyn theory is developed in the case of non-Maxwellian electron energy distribution functions (EEDFs). It is used to calculate the EEDF in the electron energy range larger than -e(V f − V p ) from the I-V double probe characteristics. V f and V p are the floating and plasma potential, respectively. The analytical distribution function corresponding to the best fit of EEDF in the energy range larger than e(V f − V p ) allows the determination of the total electron density (n e ) and the mean electron energy (< e >).The method is detailed and tested in the case of a theoretical Maxwell-Boltzmann distribution function. It is applied for experiments that are performed in expanding microwave plasmas sustained in argon. Analytical EEDFs determined by this method are compared with those measured by means of single probes under the same experimental conditions. A good agreement is observed between single and double probe measurements. Results obtained under different experimental conditions are used to define the best conditions to obtain reliable results by means of the double probe technique.
KEYWORDSelectron energy distribution function, electrostatic double probe, non-Maxwellian plasma 1
“…3 The steady state is typically obtained 40 ls after the ignition. As shown in Figures 7 and 8, the EEDF is composed of two components, which can be fitted using the generalized Maxwell distribution form [32][33][34][35] f e e ð Þ ¼ C ffiffiffiffi e e p exp À e e a k ! ;…”
Section: Eedf Analysis In the Magnetoplasma A Electron Density Amentioning
International audienceTime evolution of the Electron Energy Distribution Function(EEDF) is measured in pulsed hydrogen microwave magnetoplasma working at 2.45 GHz. Analysis is performed both in resonance (B = 0.087 T) and off-resonance conditions (B = 0.120 T), at two pressures (0.38 Pa and 0.62 Pa), respectively, and for different incident microwave powers. The important effect of the magnetic field on the electron kinetic is discussed, and a critical analysis of Langmuir probe measurements is given. The Electron Energy Distribution Function is calculated using the Druyvesteyn theory (EEDF) and is corrected using the theory developed by Arslanbekov in the case of magnetized plasma. Three different components are observed in the EEDF, whatever the theory used. They are: (a) a low electron energy component at energy lower than 10 eV, which is ascribed to the electron having inelastic collisions with heavy species (H2, H, ions), (b) a high energy component with a mean energy ranging from 10 to 20 eV, which is generally ascribed to the heating of the plasma by the incident microwave power, and (c) a third component observed between the two other ones, mainly at low pressure and in resonance conditions, has been correlated to the electron rotation in the magnetic field
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