Spectral analysis of optically excited currents in single-crystal (100)InAs/amorphous (a-)Al 2 O 3 / metal structures allows one to separate contributions stemming from the internal photoemission (IPE) of electrons into alumina and from the trapping-related displacement currents. IPE spectra suggest that the out-diffusion of In and, possibly, its incorporation in a-Al 2 O 3 lead to the development of %0.4 eV wide conduction band (CB) tail states. The top of the InAs valence band is found at 3.45 6 0.10 eV below the alumina CB bottom, i.e., at the same energy as at the GaAs/a-Al 2 O 3 interface. This corresponds to the CB and the valence band offsets at the InAs/a-Al 2 O 3 interface of 3.1 6 0.1 eV and 2.5 6 0.1 eV, respectively. However, atomic-layer deposition of alumina on InAs results in additional low-energy electron transitions with spectral thresholds in the range of 2.0-2.2 eV, which is close to the bandgap of AlAs. The latter suggests the interaction of As with Al, leading to an interlayer containing Al-As bonds providing a lower barrier for electron injection.Published by AIP Publishing.[http://dx