Soft X‐ray fluorescence (SXF) spectroscopy is X‐ray fluorescence (XRF) spectroscopy for low‐ and middle‐atomic‐number elements whose X‐ray absorption edges are in the soft X‐ray (SX) region. Electron beams have been used as excitation probes for (
nonresonant
or
normal
) SXF spectroscopy in laboratories. In addition, synchrotron radiation (SR) beams have been utilized as excitation probes, enabling selective excitation near the X‐ray absorption threshold. Selectively excited SXF involves soft X‐ray scattering, which can be regarded as a
resonant
soft X‐ray emission (SXE) spectroscopy. SXF and SXE spectroscopies provide element‐, orbital‐, and symmetry‐specific information. Thus, they are powerful tools for chemical analysis and materials characterization.
In this article, the principles of SXF/SXE spectroscopies and instrumentation focused on gratings are described. Examples of
nonresonant
(
normal
) SXF and
resonant
SXE spectroscopies are shown, and details of the spectral profiles are explained.
Resonant
SXE spectroscopy of liquid water and
operando
observations of the electrode reactions are also demonstrated as advanced chemical analyses.