Combining Measurement and Control Functions in the Structure of a Multilayer Piezoelectric Actuator of Nano- and Micro-Motions

Control of the System of Piezoelectric Actuator Devices for Precision Drive Systems

“…Systems consisting of two, three or more piezo actuators connected with each other can be of the utmost interest. The said approach to the problem allows performing movement at the required distance in one or several needed directions (Bardin and Vasil'ev, 2017;Osipov et al, 2018).…”

Modeling and simulation of bonded-type piezoelectric linear motors considering the stress transfer in adhesive layer

“…The piezoelectric motor is a form of precision actuation systems and has been used in various applications, such as precision positioning stages (Bardin and Vasilev, 2017; Cai et al, 2018), medical instruments (Chen et al, 2016; Li et al, 2020), semiconductor chip manufacturing (Ito et al, 2019), and aerospace (Koh et al, 2010). It utilizes the inverse piezoelectric effect of piezoelectric materials to transform the electric energy into the mechanical output which can be applied directly to engineering applications (Hwang et al, 2019) or amplified through specific devices (Chen et al, 2015; Li and Yao, 2018; Wang et al, 2018a) to drive mover.…”