The phase reaction and diffusion behavior of stoichiometric AuTi and CoTi intermetallic compounds were clarified using diffusion couple technique. It was found by scanning electron microscopy equipped with energy dispersive X-ray spectroscope that two intermetallic compounds of (Au,Co)Ti 3 and (Au,Co) 2 Ti were produced near interface between the AuTi and CoTi when heat-treated at 1173 K and 1273 K, and that only (Au,Co)Ti 3 was formed when heat-treated at 1373 K. The presence of these intermetallic compounds was explained by the concentration dependent diffusivity in the diffusion couple. With increasing the heat-treatment temperature from 1173 K to 1373 K, the thickness of the diffusion layer increased from 78 µm to 200 µm. The apparent activation energy for the layer growth was estimated as 127 kJ/mol. Furthermore, the diffusion path in the isothermal section at 1173 K1373 K in the AuTiCo system was also discussed.