Combined testing for MEMS characterization

Schifferle, A.; Neels, Antonia; Papes, O.; Dommann, Alex; Mazza, Edoardo

doi:10.1016/j.proeng.2010.09.249

Cited by 5 publications

(5 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Additional information about the measurement technique and the applied setup is provided in the Supporting Information. A detailed characterization and evaluation of the mentioned testing procedure was carried out elsewhere .…”

Section: Methodsmentioning

confidence: 99%

Where is the limit? Yield strength improvement in silicon micro‐structures by surface treatments

Schifferle¹,

Bandi

Neels

et al. 2015

Physica Status Solidi (a)

View full text Add to dashboard Cite

Imperfections, like surface roughness and defects, introduced by common manufacturing processes are recognized to favor failure of microfabricated components and systems. Up to now only a reduced part of the ideal strength prediction by zero Kelvin quantum mechanical ab initio calculations could be recovered for micrometer‐sized structures manufactured with DRIE. Within the present work the high‐loading fracture behavior of group IV semiconductors is investigated on the basis of specific DRIE‐etched micrometer‐sized single crystal silicon (SCSI) specimens. Aiming an enhancement of the surface quality, the samples are post‐treated using wet etchants, such as KOH and HNA and oxidation processes, such as thermal and hydrogen oxidation. The resistance of the specimens against mechanical loading is assessed by 2‐point bending tests applying a testing procedure which is outstanding due to its simplicity in handling and reproducibility of the measurement results. The experiments are analyzed and evaluated for Young's modulus, fracture and bending strength. Dependent on the particular treatment method, remarkable improvements of fracture strain and stress of up to ϵmax = 5.7% and σmax = 8.8 GPa are realized.

show abstract

Section: Methodsmentioning

confidence: 99%

Where is the limit? Yield strength improvement in silicon micro‐structures by surface treatments

Schifferle¹,

Bandi

Neels

et al. 2015

Physica Status Solidi (a)

View full text Add to dashboard Cite

show abstract

“…An experimental assessment of the axial strain is provided by the setup as well, e.g. by means of optical methods such as microscopy [ 31 , 45 ]. In the frame of the present work axial strain was estimated by FE calculation providing a specimen related expression denoted as ε axial.th which is dependent on the applied force F expressed in [N]: .…”

Section: Resultsmentioning

confidence: 99%

“…prestrain caused by a deadlock, is reduced. A detailed characterization and evaluation of our testing procedure with respect to accuracy and reproducibility was carried out and published previously [ 31 , 30 ].…”

Section: Methodsmentioning

confidence: 99%

In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis

Schifferle¹,

Dommann

Neels

2017

Science and Technology of Advanced Materials

View full text Add to dashboard Cite

New methods are needed in microsystems technology for evaluating microelectromechanical systems (MEMS) because of their reduced size. The assessment and characterization of mechanical and structural relations of MEMS are essential to assure the long-term functioning of devices, and have a significant impact on design and fabrication.Within this study a concept for the investigation of mechanically loaded MEMS materials on an atomic level is introduced, combining high-resolution X-ray diffraction (HRXRD) measurements with finite element analysis (FEA) and mechanical testing. In situ HRXRD measurements were performed on tensile loaded single crystal silicon (SCSi) specimens by means of profile scans and reciprocal space mapping (RSM) on symmetrical (004) and (440) reflections. A comprehensive evaluation of the rather complex XRD patterns and features was enabled by the correlation of measured with simulated, ‘theoretical’ patterns. Latter were calculated by a specifically developed, simple and fast approach on the basis of continuum mechanical relations. Qualitative and quantitative analysis confirmed the admissibility and accuracy of the presented method. In this context [001] Poisson’s ratio was determined providing an error of less than 1.5% with respect to analytical prediction. Consequently, the introduced procedure contributes to further going investigations of weak scattering being related to strain and defects in crystalline structures and therefore supports investigations on materials and devices failure mechanisms.

show abstract

“…To verify the predictions of the material models developed for the FE analyses in this study, a 2‐point bending method developed at the Centre of Mechanics (IfM) at ETH (Zürich, Switzerland) was implemented to monitor the restoring forces over time with a highly sensitive load cell 35. A cut segment of a fiber was positioned manually into the test setup, which consisted of two parallel supports with a milled groove on each side (Figure 2).…”

Section: Methodsmentioning

confidence: 99%

Design and Characterization of a Bicomponent Melt‐Spun Fiber Optimized for Artificial Turf Applications

Hufenus

Affolter

Camenzind

et al. 2012

Macro Materials & Eng

View full text Add to dashboard Cite

Artificial turf is robust, playable in all weathers and has a long service life. Polyamide (PA) flooring has excellent resilience but provokes abrasion injuries (friction burn); polyethylene (PE) monofilaments are skin‐friendly but tend to permanent deformation. To maximize resilience while minimizing the risk of skin abrasion, PA‐PE bicomponent fibers are developed. Numeric simulation is applied to find optimized fiber cross‐sections and material combinations, accompanied by melt‐spinning of respective filaments and validation of the model. The resulting artificial grass resembles natural turf with respect to playability and appearance and does not need any granular infill.

show abstract

Combined testing for MEMS characterization

Cited by 5 publications

References 3 publications

Where is the limit? Yield strength improvement in silicon micro‐structures by surface treatments

Where is the limit? Yield strength improvement in silicon micro‐structures by surface treatments

In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis

Design and Characterization of a Bicomponent Melt‐Spun Fiber Optimized for Artificial Turf Applications

Contact Info

Product

Resources

About