Combinatorial synthesis and screening of (Ba,Sr)(Ti,Mn)O₃ thin films for optimization of tunable co-planar waveguides

Abstract

(BaSr)/(TiMn)O3 dielectric thin films prepared by combinatorial synthesis are used in tunable co-planar waveguides which allowed measurements at frequencies exceeding 10 GHz.

Origin of improved tunability and loss in N2 annealed barium strontium titanate films

“…BaxSr1-xTiO3 was deposited on Pt coated substrates (Pt/TiO2/SiO2/Si) using a high throughput modified Molecular Beam Epitaxy [22] system from DCA Instruments, as described elsewhere [23]. Elemental sources of Ba (Alfa Aesar: 99.9%) and Sr pieces (Alfa Aesar: 99%) were contained in Ta…”

“…HT-ePVD is based on the evaporation of elemental sources employing wedge shutters to obtain a compositional spread that results in physical property changes across the film. Different dopants are incorporated onto the A-(Ba), B-(Ti) or simultaneously on the A and B sites [23,24] of the ABO3 perovskite structure, resulting in ternary or quaternary solid solutions [25]. A plasma atom source is used to provide reactive oxygen co-deposited with metal atoms: This ensures oxygen stoichiometry during synthesis, at temperatures much lower than post annealing in molecular oxygen.…”

Multibeam Dual-Circularly Polarized Reflectarray for Connected and Autonomous Vehicles

“…As shown, only one feed antenna is required and the four beams can be independently as well as continuously scanned within a large angle range. Besides using conventional phase shifters, recent research progress on the tunable materials such as electrically tunable barium strontium titanate perovskite (BSTO) films can also be applied to the array antenna design [30], [31], [32]. The thin films show high relative permittivity, low loss tangent, and high tunability, which can be used to develop BSTO based phase shifters.…”

“…The thin films show high relative permittivity, low loss tangent, and high tunability, which can be used to develop BSTO based phase shifters. For example, the M ndoped BSTO films presented in [30] show promising dielectric tunability and low insertion loss (3.2 dB at 10 GHz with the coplanar waveguides). The future development in materials is expected to make these tunable materials more suitable for Satcom-on-the-Move array antenna applications with moderate cost.…”

ABO3 and A1−xCxB1−yDy(O1−zEz)3: review of experimental optimisation of thin film perovskites by high-throughput evaporative physical vapour deposition

“…xFeyO3-δ 79 , ferroelectricity in BixNa1-xTiyO3-δ 80,81 , tunable capacitors BaxSr1-xTiy03-δ 82 82 and BaxSr1-xTiyMn1-yO3-δ 83 , lithium electrolytes as LaxLi1-xTiyO3-δ 84 and electrocatalysis with SrxTi1-yFeyO3-δ 4 , LaxCa1-xMnyO3-δ 5 and LaxMnyNi1-yO3-δ 5 have all been studied using this approach. This broad range of applications have all required different type of substitution on either A-sites, B-sites, anionic sites or a combination of all the above.…”