Combinatorial Investigation of the Vapor Deposition Polymerization of Aromatic Polyimides

Bäte, Markus; Neuber, Christian; Giesa, Reiner; Schmidt, Hans‐Werner

doi:10.1002/marc.200300252

Cited by 14 publications

(12 citation statements)

References 14 publications

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“…2(b), uses sources that give a uniform flux to the substrate and a contact mask, which slides across the substrate surface to vary the effective deposition time, and thus, the thickness at different locations on the substrate. [21][22][23] The CSAFs are generated by sequential deposition of components with gradients in different directions. One of the limitations of this method is that the components cannot be codeposited and subsequent annealing may not lead to complete mixing, unless each layer is no more than one atomic monolayer in thickness.…”

Section: Methods For Preparation Of Csafsmentioning

confidence: 99%

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Fleutot¹,

Miller²,

Gellman³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Composition spread alloy films (CSAFs) are materials libraries used for high throughput investigations of multicomponent materials such as alloys, AxByC1−x−y. CSAFs are prepared such that the alloy film has a lateral spatial gradient in its local composition; thus, they include a set of alloy samples with a distribution of compositions that spans a continuous region of composition space (x,y). A tool based on the shadow mask concept has been developed for generating composition gradients, but modified to allow rotation of the shadow mask during CSAF deposition. The tool allows deposition of CSAFs containing up to four elements with rotatable shadow masks between each of the four electron beam evaporation sources and the deposition substrate. This allows codeposition of any combination of up to four components. In the case of the ternary AxByC1−x−y CSAFs, the three components can be deposited such that the resulting CSAF spans the entire ternary alloy composition space (x = 0 → 1, y = 0 → 1 − x) and, furthermore, contains all three binary alloys AxB1−x, AxC1−x, and BxC1−x (x = 0 → 1) and all three pure components. The innovation of the rotatable shadow masks also allows preparation of CSAFs that magnify selected regions of the composition space (x = xmin → xmax, y = ymin → 1 − x). Herein, we describe the design and performance of this new CSAF deposition tool and assess its merits and limitations with respect to other methods for CSAF preparation.

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Section: Methods For Preparation Of Csafsmentioning

confidence: 99%

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Fleutot¹,

Miller²,

Gellman³

2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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“…FTIR measurements were performed to characterize the films, and UV as well as polarized light microscopy were used to investigate the complex interplay between evaporation and orientation behavior before, during, and after thermal imidization. [313] …”

Section: Ht Studies On the Formation Of Polymersmentioning

confidence: 97%

Combinatorial and High‐Throughput Materials Science

2007

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There is increasing acceptance of high-throughput technologies for the discovery, development, and optimization of materials and catalysts in industry. Over the years, the relative synchronous development of technologies for parallel synthesis and characterization has been accompanied by developments in associated software and information technologies. This Review aims to provide a comprehensive overview on the state of the art of the field by selected examples. Technologies developed to aid research on complex materials are covered as well as databases, design of experiment, data-mining technologies, modeling approaches, and evolutionary strategies for development. Different methods for parallel synthesis provide single sample libraries, gradient libraries for electronic or optical materials, similar to polymers and catalysts, and products produced through formulation strategies. Many examples illustrate the variety of isolated solutions and document the barely recognized variety of new methods for the synthesis and analysis of almost any material. The Review ends with a summary of success stories and statements on still-present problems and future tasks.

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“…Being a dry process, it offers the same advantages that other vapor‐based deposition processes have over solution and melt processing and can be scaled up and integrated into a microfabrication assembly line. VDP is conducive to tuning film properties such as thickness, conformation, crystallinity and surface orientation 2, 61, 222, 309–317. Films with improved device performance, dielectric properties, stiffness, density and hygroscopic resistance have been deposited by VDP 311, 314, 315.…”

Section: Unifying Themesmentioning

confidence: 99%

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

et al. 2010

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Chemical vapor deposition (CVD) polymerization utilizes the delivery of vapor-phase monomers to form chemically well-defined polymeric films directly on the surface of a substrate. CVD polymers are desirable as conformal surface modification layers exhibiting strong retention of organic functional groups, and, in some cases, are responsive to external stimuli. Traditional wet-chemical chain- and step-growth mechanisms guide the development of new heterogeneous CVD polymerization techniques. Commonality with inorganic CVD methods facilitates the fabrication of hybrid devices. CVD polymers bridge microfabrication technology with chemical, biological, and nanoparticle systems and assembly. Robust interfaces can be achieved through covalent grafting enabling high-resolution (60 nm) patterning, even on flexible substrates. Utilizing only low-energy input to drive selective chemistry, modest vacuum, and room-temperature substrates, CVD polymerization is compatible with thermally sensitive substrates, such as paper, textiles, and plastics. CVD methods are particularly valuable for insoluble and infusible films, including fluoropolymers, electrically conductive polymers, and controllably crosslinked networks and for the potential to reduce environmental, health, and safety impacts associated with solvents. Quantitative models aid the development of large-area and roll-to-roll CVD polymer reactors. Relevant background, fundamental principles, and selected applications are reviewed.

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Combinatorial Investigation of the Vapor Deposition Polymerization of Aromatic Polyimides

Cited by 14 publications

References 14 publications

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Apparatus for deposition of composition spread alloy films: The rotatable shadow mask

Combinatorial and High‐Throughput Materials Science

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

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