Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Taylor, Matthew P.; Readey, Dennis W.; Teplin, Charles W.; Hest, Maikel F.A.M. van; Alleman, J.; Dabney, Matthew S.; Gedvilas, L. M.; Keyes, B. M.; To, Bobby; Perkins, John D.; Ginley, David S.

doi:10.1002/marc.200300231

Cited by 19 publications

(9 citation statements)

References 6 publications

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“…The EPMA results were referenced to bulk standards and no quantitative corrections were applied to account for the thickness of these films. In previous work, the indium to zinc ratio was reported using EPMA with a 20 kV accelerating potential [12,49]. However, a better correlation was found between the results of the 10 kV EPMA measurements and independent inductively coupled plasma spectroscopy and Rutherford backscattering measurements than with the 20 kV results.…”

Section: Methodsmentioning

confidence: 72%

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

Taylor

Readey

Hest

et al. 2008

Adv Funct Materials

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162

122

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Transparent conducting oxides (TCOs) are increasingly critical components in photovoltaic cells, low‐e windows, flat panel displays, electrochromic devices, and flexible electronics. The conventional TCOs, such as Sn‐doped In2O3, are crystalline single phase materials. Here, we report on In‐Zn‐O (IZO), a compositionally tunable amorphous TCO with some significantly improved properties. Compositionally graded thin film samples were deposited by co‐sputtering from separate In2O3 and ZnO targets onto glass substrates at 100 °C. For the metals composition range of 55–84 cation% indium, the as‐deposited IZO thin films are amorphous, smooth (RRMS < 0.4 nm), conductive (σ ∼ 3000 Ω−1 · cm−1), and transparent in the visible (TVis > 90%). Furthermore, the amorphous IZO thin films demonstrate remarkable functional and structural stability with respect to heating up to 600 °C in either air or argon. Hence, though not completely understood at present, these amorphous materials constitute a new class of fundamentally interesting and technologically important high performance transparent conductors.

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Section: Methodsmentioning

confidence: 72%

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

Taylor

Readey

Hest

et al. 2008

Adv Funct Materials

Self Cite

162

122

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“…Taylor et al have grown compositionally graded, combinatorial libraries of indium-doped ZnO (IZO) by cosputtering ZnO and In 2 O 3 on glass at 100 8C with an In content ranging from 5 to 50 %. [276] They were able to cover almost 50 % of the ZnO-In 2 O 3 phase space with only three depositions. The highest conductivity was found in samples with 48 % In.…”

Section: Other Optically Functional Oxidesmentioning

confidence: 99%

Combinatorial and High‐Throughput Materials Science

2007

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There is increasing acceptance of high-throughput technologies for the discovery, development, and optimization of materials and catalysts in industry. Over the years, the relative synchronous development of technologies for parallel synthesis and characterization has been accompanied by developments in associated software and information technologies. This Review aims to provide a comprehensive overview on the state of the art of the field by selected examples. Technologies developed to aid research on complex materials are covered as well as databases, design of experiment, data-mining technologies, modeling approaches, and evolutionary strategies for development. Different methods for parallel synthesis provide single sample libraries, gradient libraries for electronic or optical materials, similar to polymers and catalysts, and products produced through formulation strategies. Many examples illustrate the variety of isolated solutions and document the barely recognized variety of new methods for the synthesis and analysis of almost any material. The Review ends with a summary of success stories and statements on still-present problems and future tasks.

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“…Although they typically exhibit lower conductivities than crystalline materials, amorphous films are of interest because they do not require annealing at high temperature. In a comprehensive body of work, 193,[198][199][200] CCS libraries were deposited in a specially designed reactive sputtering chamber, using an off axis sputtering configuration. Multiple depositions were necessary to fully cover the compositional phase diagram.…”

mentioning

confidence: 99%

Applications of high throughput (combinatorial) methodologies to electronic, magnetic, optical, and energy-related materials

Green

Takeuchi

Hattrick‐Simpers

2013

Journal of Applied Physics

223

189

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High throughput (combinatorial) materials science methodology is a relatively new research paradigm that offers the promise of rapid and efficient materials screening, optimization, and discovery. The paradigm started in the pharmaceutical industry but was rapidly adopted to accelerate materials research in a wide variety of areas. High throughput experiments are characterized by synthesis of a "library" sample that contains the materials variation of interest (typically composition), and rapid and localized measurement schemes that result in massive data sets. Because the data are collected at the same time on the same "library" sample, they can be highly uniform with respect to fixed processing parameters. This article critically reviews the literature pertaining to applications of combinatorial materials science for electronic, magnetic, optical, and energy-related materials. It is expected that high throughput methodologies will facilitate commercialization of novel materials for these critically important applications. Despite the overwhelming evidence presented in this paper that high throughput studies can effectively inform commercial practice, in our perception, it remains an underutilized research and development tool. Part of this perception may be due to the inaccessibility of proprietary industrial research and development practices, but clearly the initial cost and availability of high throughput laboratory equipment plays a role. Combinatorial materials science has traditionally been focused on materials discovery, screening, and optimization to combat the extremely high cost and long development times for new materials and their introduction into commerce. Going forward, combinatorial materials science will also be driven by other needs such as materials substitution and experimental verification of materials properties predicted by modeling and simulation, which have recently received much attention with the advent of the Materials Genome Initiative. Thus, the challenge for combinatorial methodology will be the effective coupling of synthesis, characterization and theory, and the ability to rapidly manage large amounts of data in a variety of formats. V C 2013 AIP Publishing LLC. [http://dx

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Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Cited by 19 publications

References 6 publications

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

Combinatorial and High‐Throughput Materials Science

Applications of high throughput (combinatorial) methodologies to electronic, magnetic, optical, and energy-related materials

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