Combination of a millimeter scale reactor and gas chromatography-mass spectrometry for mapping higher order silane formation during monosilane pyrolysis

Wyller, Guro Marie; Anjitha, S.G.; Skare, Marte Orderud; Marstein, Erik Stensrud

doi:10.1016/j.jcrysgro.2019.125305

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2024

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“…The complex thermal SiH 4 decomposition process includes formation of different higher order silane species (Si x H y ) that eventually grow into polymeric chains and rings, and the rings finally stack into complexes. 26,27 At this stage, the reactions are exothermic and irreversible. To grow stable aggregate particles, the reaction parameters were adjusted to maximize formation of a large number of nuclei, such that each particle would compete for the same precursor gas and thus be limited in size.…”

Section: Methodsmentioning

confidence: 99%